Hongchao Cao

Three-port beam splitter of a binary fused-silica grating

A deep-etched polarization-independent binary fused-silica phase grating as a three-port beam splitter is designed and manufactured. The grating profile is optimized by use of the rigorous coupled-wave analysis around the 785 nm wavelength. The physical explanation of the grating is illustrated by the modal method. Simple analytical expressions of the diffraction efficiencies and modal guidelines for the three-port beam splitter grating design are given. Holographic recording technology and inductively coupled plasma etching are used to manufacture the fused-silica grating. Experimental results are in good agreement with the theoretical values.

Design and fabrication of a polarization-independent wideband transmission fused-silica grating

A fused-silica polarization-independent wideband transmission grating used in the -1st order (Littrow mounting) for chirped-pulse-amplification, high-power lasers is designed and manufactured. An approximate grating profile can be obtained by using the simplified modal method with consideration for the corresponding accumulated phase difference of two excited propagating grating modes. An exact grating profile is optimized by using the rigorous coupled-wave analysis. With the optimized profile parameters, the gratings can theoretically exhibit diffraction efficiencies of greater than 97% at a wavelength of 800 nm for both of TE- and TM-polarized waves. Diffraction efficiencies of greater than 92% can be obtained in a 100 nm bandwidth (from 750 to 850 nm) for both TE- and TM-polarized waves. Holographic recording technology and inductively coupled plasma etching are used to manufacture the fused-silica grating. Experimental results agree well with the theoretical values.

Design and fabrication of a polarization-independent two-port beam splitter

We design and manufacture a fused-silica polarization-independent two-port beam splitter grating. The physical mechanism of this deeply etched grating can be shown clearly by using the simplified modal method with consideration of corresponding accumulated phase difference of two excited propagating grating modes, which illustrates that the binary-phase fused-silica grating structure depends little on the incident wavelength, but mainly on the ratio of groove depth to grating period and the ratio of incident wavelength to grating period. These analytic results would also be very helpful for wavelength bandwidth analysis. The exact grating profile is optimized by using the rigorous coupled-wave analysis. Holographic recording technology and inductively coupled plasma etching are used to manufacture the fused-silica grating. Experimental results agree well with the theoretical values.

Three-dimensional Dammann array

We demonstrate a scheme that can produce a three-dimensional (3D) focus spot array in a 3D lattice structure, called a 3D Dammann array, in focal region of an objective. This 3D Dammann array is generated by using two separate micro-optical elements, a Dammann zone plate (DZP) that produces a series of coaxial focus spots and a conventional two-dimensional (2D) Dammann grating (DG). A simple, fast, and clear method is presented to design this binary pure-phase (0,π) DZP in vectorial Debye theory regime. Based on this kind of DZP, one can always obtain a 3D Dammann array both for low and high numerical aperture (NA) focusing objectives. For experimental demonstration, an arrangement combining a DZP, a 2D DG, and a pair of opposing lenses is proposed to generate a 5×5×5 Dammann array in focal region of an objective with NA=0.127 and another 6×6×7 Dammann array for an objective of NA=0.66. It is shown that this arrangement makes it possible to achieve 3D Dammann arrays with micrometer-sized focus spots and focus spacings of tens of micrometers for various practical applications, such as 3D parallel micro- and nanomachining, 3D simultaneous optical manipulation, 3D optical data storage, and multifocal fluorescence microscope, etc.

Dual-function beam splitter of a subwavelength fused-silica grating

We present the design and fabrication of a novel dual-function subwavelength fused-silica grating that can be used as a polarization-selective beam splitter. For TM polarization, the grating can be used as a two-port beam splitter at a wavelength of 1550 nm with a total diffraction efficiency of 98%. For TE polarization, the grating can function as a high-efficiency grating, and the diffraction efficiency of the -1st order is 95% under Littrow mounting. This dual-function grating design is based on a simplified modal method. By using the rigorous coupled-wave analysis, the optimum grating parameters can be determined. Holographic recording technology and inductively coupled plasma etching are used to manufacture the fused-silica grating. Experimental results are in agreement with the theoretical values.

Deep-etched sinusoidal polarizing beam splitter grating

A sinusoidal-shaped fused-silica grating as a highly efficient polarizing beam splitter (PBS) is investigated based on the simplified modal method. The grating structure depends mainly on the ratio of groove depth to grating period and the ratio of incident wavelength to grating period. These ratios can be used as a guideline for the grating design at different wavelengths. A sinusoidal-groove PBS grating is designed at a wavelength of 1310 nm under Littrow mounting, and the transmitted TM and TE polarized waves are mainly diffracted into the zeroth order and the -1st order, respectively. The grating profile is optimized by using rigorous coupled-wave analysis. The designed PBS grating is highly efficient (>95.98%) over the O-band wavelength range (1260-1360 nm) for both TE and TM polarizations. The sinusoidal grating can exhibit higher diffraction efficiency, larger extinction ratio, and less reflection loss than the rectangular-groove PBS grating. By applying wet etching technology on the rectangular grating, which was manufactured by holographic recording and inductively coupled plasma etching technology, the sinusoidal grating can be approximately fabricated. Experimental results are in agreement with theoretical values.

Polarization-Independent Absorber Based on a Cascaded Metal–Dielectric Grating Structure

The spectrum selective absorption effect of a vertically cascaded metal-dielectric grating structure is studied. A polarization-independent spectrum selective absorber based on two pairs of stacked metal-dielectric grating structures is presented for the infrared frequencies. The near-unity absorption with polarization independence is observed under normal incidence. The understanding of such a perfect selective absorption mechanism is illustrated by investigating the electric field distributions and power loss density at the resonant wavelength. The angle independence is also studied for this absorber and it is found that the absorber can maintain high absorbance around large incident angle range (0° -33° ), especially for the TM polarization.

Polarization-independent wideband mixed metal dielectric reflective gratings

A polarization-independent wideband mixed metal dielectric grating with high efficiency of the -1st order is analyzed and designed in Littrow mounting. The mixed metal dielectric grating consists of a rectangular-groove transmission dielectric grating on the top layer and a highly reflective mirror composed of a connecting layer and a metal film. Simplified modal analysis is carried out, and it shows that when the phase difference accumulated by the two propagating modes is odd multiples of π/2, the diffraction efficiency of the -1st order will be high. Selecting grating depth and duty cycle for satisfying the phase difference condition for both TE (electric field parallel to grooves) and TM (magnetic field parallel to grooves) polarizations, a polarization-independent high-efficiency grating can be designed. Using rigorous coupled-wave analysis and a simulated annealing algorithm, geometric parameters of the reflective grating are exactly obtained. The optimized grating for operation around a wavelength of 800 nm exhibits diffraction efficiencies higher than 90% for both TE and TM polarizations over a 120 nm wavelength bandwidth. The simplified modal analysis can be applied in other types of reflective gratings if the top layer is a dielectric transmission grating.

A metal-mirror-based reflecting polarizing beam splitter

We theoretically investigated the design of a metal-mirror-based reflecting polarizing beam splitter (RPBS). The metal mirror is a silver slab, which is embedded in the substrate of a rectangular silica transmission grating. By using a modal analysis and rigorous coupled-wave analysis, an RPBS grating is designed for operation at 1550 nm. When it is illuminated in Littrow mounting, the transverse electric (TE) and transverse magnetic (TM) waves will be mainly reflected in the minus-first and zeroth orders, respectively. Moreover, a wideband RPBS grating is obtained by adopting the simulated annealing algorithm. The RPBS gratings exhibit high diffraction efficiencies (similar to 95%) and high extinction ratios over a certain angle and wavelength range, especially for the minus-first-order reflection. This kind of RPBS should be useful in practical optical applications.

Modal analysis of high-efficiency wideband reflective gratings

Modal analysis of the reflective wideband grating with high efficiency of the negative first order in Littrow mounting is presented. The reflective grating consists of a highly reflective mirror and a transmission grating on the top. The modal analysis is carried out for TE polarization and it reveals that two modes are excited in the transmission grating. Using the two modes and ignoring the absorption of the mirror, a simple expression of diffraction efficiency of the reflective grating is derived and thus the grating depth to achieve high efficiency of the negative first order is obtained. The influence of duty cycle on the difference of effective indices of the two modes for different wavelengths is analyzed, which can explain the wideband behavior of reflective gratings. The modal analysis should be a useful tool for the design of high-efficiency wideband reflective gratings