Honglin Chen

Method and device for detecting failed production machine platforms

Device monitoring method during semiconductor process

Method for controlling defects of wafer edge

Automatic defect scanning and casual inspecting method and automatic defect scanning and casual inspecting device for controlling abnormality during silicon wafer production

Defect detecting method for utilizing graphic features to scan and manufacturing method of semiconductor chip

Sensitive photoresist tolerance degree detection method and wafer defect detection method

Method for measuring and calculating semiconductor device well block implanted ion transverse diffusing capacity

Method for repairing metastable state chemical bond on surface of wafer tungsten connecting layer

Defect monitoring method based on connection with internal process information of machine

Method for repairing metastable chemical bond on surface of wafer