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Hongqin Shi

Texas Instruments

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Publication

Featured researches published by Hongqin Shi.

Archive | 2002

Method for vapor phase etching of silicon

Satyadev Patel; Gregory P. Schaadt; Douglas B. MacDonald; Hongqin Shi; Andrew Huibers; Peter Heureux

Archive | 2003

Etching method used in fabrications of microstructures

Hongqin Shi; Gregory P. Schaadt; Andrew Huibers; Satyadev Patel

Archive | 2005

Micromirror device and method for making the same

Satyadev Patel; Andrew Huibers; Jonathan Doan; James Dunphy; Dmitri Simonian; Hongqin Shi; Jianglong Zhang

Archive | 2001

Method for achieving improved selectivity in an etching process

Satyadev Patel; Gregory P. Schaadt; Douglas B. MacDonald; Hongqin Shi

Archive | 2005

Micromirror devices with in-plane deformable hinge

Andrew Huibers; Satyadev Patel; Jonathan Doan; James Dunphy; Dmitri Simonian; Hongqin Shi; Jianglong Zhang

Archive | 2002

Apparatus and method for detecting an endpoint in a vapor phase etch

Satyadev Patel; Gregory P. Schaadt; Douglas B. MacDonald; Niles K. MacDonald; Hongqin Shi

Archive | 2007

Micromirror devices and methods of making the same

Andrew Huibers; Hongqin Shi; James Dunphy; Satyadev Patel

Archive | 2005

Removal of sacrificial materials in MEMS fabrications

Hongqin Shi; Dmitri Simonian

Archive | 2007

System and Method for Display Illumination

James Dunphy; Hongqin Shi; Regis Grasser; Jeffrey Scott Farris

Archive | 2003

Methods and apparatus of etch process control in fabrications of microstructures

Hongqin Shi; Gregory P. Schaadt

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Collaboration

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Satyadev Patel

Texas Instruments

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Andrew Huibers

Texas Instruments

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Gregory P. Schaadt

Texas Instruments

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James Dunphy

Texas Instruments

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Dmitri Simonian

Texas Instruments

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Douglas B. MacDonald

Texas Instruments

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Jianglong Zhang

Texas Instruments

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Jonathan Doan

Texas Instruments

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James C. Dunphy

Google

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Ozan Cakmakci

Google

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