Hoon Song

Optimal synthesis of double-phase computer generated holograms using a phase-only spatial light modulator with grating filter.

We propose an optical system for synthesizing double-phase complex computer-generated holograms using a phase-only spatial light modulator and a phase grating filter. Two separated areas of the phase-only spatial light modulator are optically superposed by 4-f configuration with an optimally designed grating filter to synthesize arbitrary complex optical field distributions. The tolerances related to misalignment factors are analyzed, and the optimal synthesis method of double-phase computer-generated holograms is described.

A symmetrical z-axis gyroscope with a high aspect ratio using simple and new process

This paper reports on a symmetrical z-axis gyroscope, whose stiffness of sensing and driving mode is identical in spite of the fabrication and design errors. There is no need of the electrical tuning of frequencies for a high sensitivity because the effective masses of the driving and sensing directions are hardly changed. Furthermore, it is very simple to fabricate the gyroscope with a total chip size of 3/spl times/3.5/spl times/1 mm/sup 2/ using only one mask. The gyroscope structure is fabricated on an anodic bonded 40 /spl mu/m-thick silicon on glass. After the top silicon is etched using a deep RIE, a part of the glass under the silicon structure is etched by HF for releasing the top silicon structure. Since the depth of the etched glass under the silicon structure is about 20/spl sim/30 /spl mu/m, the damping and the stiction between the structure and the glass substrate are minimized. The minimum gap and the aspect ratio of this structure is 2 /spl mu/m and 20, respectively. Without an additional frequency tuning method, it is demonstrated that the difference between the two frequencies is about 85 Hz, and the noise equivalent rate is 0.01 deg/sec at 50 mTorr pressure.

Wafer level vacuum packaged de-coupled vertical gyroscope by a new fabrication process

A highly reliable, wafer level vacuum packaged and de-coupled vertical microgyroscope was developed. The de-coupled gyroscope which had four driving springs and two sensing springs was designed and fabricated. A new fabrication process which could realize a high aspect ratio and use a thick single crystalline silicon as a structure layer, was proposed. The vacuum environment for operating a vibratory gyroscope was accomplished with vacuum packaging at wafer level. The vacuum level of ambient pressure was about 150 mtorr. The resolution of the gyroscope was 0.013/spl deg//sec/Hz/sup 1/2/. The output nonlinearity was below 2% in /spl plusmn/100/spl deg//s full scale.

T-jet: a novel thermal inkjet printhead with monolithically fabricated nozzle plate on SOI wafer

A novel thermal inkjet printhead with monolithically fabricated nickel nozzle plate on SOI wafer has been proposed for the first time. A chamber and a restrictor are implemented on the 40 /spl mu/m thick top-silicon layer, and a nozzle plate covering heater layers are monolithically fabricated on them. Unlike the general back-shooters, the inkjet printhead reported here is a kind of back-shooter, which has a chamber and a restrictor with arbitrary shape by utilizing the silicon dioxide etch-stop layers in the bottom and sidewalls of chamber. Moreover, nozzle plating mold process, followed by placing the chamber underneath the heater layer, is performed on a planar surface, resulting in more uniform and reliable control of nozzle size. The new design was applied for monochrome inkjet printhead, which has 56 nozzles in 2 columns with real 600NPI(nozzle per inch), and showed good performances such as a drop velocity of 12 m/s, a drop volume of 30 pl, and a maximum firing frequency of 12 kHz for single nozzle ejection. From nozzle by nozzle inspection, we observed the uniformity variation of less than 4% in drop speed as well as drop volume. The monolithic fabrication process resulted in a good uniformity and is expected to have superior manufacturing yield to the nozzle assembly process.

Three-dimensional holographic display using active shutter for head mounted display application

Three-dimensional holographic system using active shutters for head mounted display application is proposed. Conventional three-dimensional head mounted display suffers from eye-fatigue since it only provides binocular disparity, not monocular depth cues like accommodation. The proposed method presents two holograms of a 3D scene to corresponding eyes using active shutters. Since a holography delivered to each eye has full three-dimensional information, not only the binocular depth cues but also monocular depth cues are presented, eliminating eye-fatigue. The application to the head mounted display also greatly relaxes the viewing angle requirement that is one of the main issues of the conventional holographic displays. In presentation, the proposed optical system will be explained in detail with experimental results.

Arrayed beam steering device for advanced 3D displays

An arrayed beam steering device enables much simplified system architectures for high quality multiview 3D displays by adapting time multiplexing and eye tracking scheme. An array device consisting of microscale liquid prisms is presented, where the prism surface between two immiscible liquids is electrically controlled to steer light beams by the principle of electrowetting. An array prototype with 280×280μm pixels was fabricated and demonstrated of its full optical performances. The maximum tilting angle of each prism was measured to be 22.5° in average, with a tracking resolution of less than 0.04°. In this paper, we report a design and fabrication of eletrowetting based prism array, opto-fluidic simulations, optical characterizations, as well as applications to achieve low fatigue 3D displays.

Slim coherent backlight unit for holographic display using full color holographic optical elements

The coherent backlight unit (BLU) using a holographic optical element (HOE) for full-color flat-panel holographic display is proposed. The HOE BLU consists of two reflection type HOEs that change the optical beam path and shape by diffraction. The illumination area of backlight is 150 mm x 90 mm and the thickness is 10 mm, which is slim compared to other conventional coherent backlight units for holographic display systems. This backlight unit exhibits a total efficiency of 8.0% at red (660 nm), 7.7% at green (532 nm), and 3.2% at blue (460 nm) using optimized recording conditions for each wavelength. As a result, we could get a bright full color hologram image.

Enhancement of the effective viewing window for holographic display with amplitude-only SLM

We propose the effective viewing window enhancement method for a holographic display with an amplitude-only SLM by using algorithmic approach. The basic concept is the superposition principle of holography. The multiple computer generated holograms (CGH) can be displayed on the SLM, and multiple 3D images are reconstructed at different positions within a viewing window simultaneously. In the experiments, we have implemented the holographic display using an amplitude-only SLM, a field lens, and laser light sources. We can observe the holographic 3D image in the frustum formed by the field lens through the viewing window located in the Fourier plane of the hologram. To enhance the effective viewing window, we generate multiple CGHs with an observer’s eye positions, and then overlap them to make the final CGH. Multiple 3D images can be reconstructed in different positions within the theoretical viewing window from the CGH displayed on SLM. This makes the enlargement of viewing zone that can observe the holographic images. The multiple holograms can be also made for enlargement of the viewing window along both horizontal and vertical direction (2D enlargement viewing zone). We confirmed that the experimental results and the simulation based on Rayleigh-Sommerfeld theory match well.

Ultra-slim coherent backlight unit for mobile holographic display

We propose slim coherent backlight unit for a mobile holographic display. This backlight unit consists of glass substrate for waveguide and two surface gratings produced by two-beam interference. The area of backlight illumination is 150 by 85 mm, and the thickness is 0.7 mm, which is thin compared to other conventional coherent backlight units. This backlight unit exhibits a total efficiency of 0.1%, preserving the collimation and a uniformity of 80% over the whole area. The proposed slim coherent backlight can be applied to a mobile holographic display.

High collimated coherent illumination for reconstruction of digitally calculated holograms: design and experimental realization

Future commercialization of glasses-free holographic real 3D displays requires not only appropriate image quality but also slim design of backlight unit and whole display device to match market needs. While a lot of research aimed to solve computational issues of forming Computer Generated Holograms for 3D Holographic displays, less focus on development of backlight units suitable for 3D holographic display applications with form-factor of conventional 2D display systems. Thereby, we report coherent backlight unit for 3D holographic display with thickness comparable to commercially available 2D displays (cell phones, tablets, laptops, etc.). Coherent backlight unit forms uniform, high-collimated and effective illumination of spatial light modulator. Realization of such backlight unit is possible due to holographic optical elements, based on volume gratings, constructing coherent collimated beam to illuminate display plane. Design, recording and measurement of 5.5 inch coherent backlight unit based on two holographic optical elements are presented in this paper.