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Huang Zhilin

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Publication

Featured researches published by Huang Zhilin.

Archive | 2012

Method for dynamically detecting etched end point

Li Jun-Liang; Wang Zhao-Xiang; Huang Zhilin; Du Ruo-Xin

Archive | 2017

Inductively-coupled plasma processor

Liu Ji-Lin; Zuo Taotao; Wu Di; Huang Zhilin; Ni Tuqiang

Archive | 2012

End point monitoring method for plasma etching process

Li Jun-Liang; Wang Zhao-Xiang; Huang Zhilin; Wang Hongjun

Archive | 2017

Method for etching silicon substrate in BOSCH process

Wang Hongqing; Huang Zhilin

Archive | 2017

Device and method for monitoring plasma process

Huang Zhilin; Wang Hongjun

Archive | 2017

Method of improving etching process endpoint monitoring accuracy and etching method

Huang Zhilin; Huang Qiuping; Wang Hongqing; Yan Lijun; Ni Tuqiang

Archive | 2014

Plasma reactor for improving gas distribution

Yang Pian; Shi Gang; Wang Zhao-Xiang; Huang Zhilin

Archive | 2014

Etching method and device for improving side wall streaks

Liu Zhiqiang; Wang Zhao-Xiang; Du Ruo-Xin; Huang Zhilin

Archive | 2014

Method for improving TSV side wall roughness in TSV etching

Wang Zhao-Xiang; Yan Li-Jun; Huang Zhilin; Qiu Dayan

Archive | 2013

Plasma etching chamber

Wang Zhao-Xiang; Li Jun-Liang; Liu Zhiqiang; Huang Zhilin

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Collaboration

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