Hyun Jin In

Origami fabrication of nanostructured, three-dimensional devices: Electrochemical capacitors with carbon electrodes

The Nanostructured Origami™ process consists of patterning a two-dimensional (2-D) membrane with desired micro- and nanoscale features and then folding it into a three-dimensional (3-D) configuration. Electrochemical capacitors, or supercapacitors, are ideal for origami fabrication because their performance can be enhanced through the use of 3-D geometry and nanostructured materials. A supercapacitor with an electrode area of 350×350μm was created using the origami process and characterized using electrochemical analysis methods. The experimentally measured capacitance values of approximately 1μF are consistent with theoretical predictions.

The nanostructured Origami/sup TM/ 3D fabrication and assembly process for nanomanufacturing

Nanostructured Origami/sup TM/ 3D fabrication and assembly process is a method of manufacturing 3D nanosystems using exclusively 2D litho tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation, and modeling aspects of the manufacturing process, and present experimental results from fabricated structures.

Carbon nanotube–based magnetic actuation of origami membranes

Multiwalled carbon nanotubes (CNTs) with nickel and cobalt catalyst tips have been grown on foldable titanium nitride membranes. Once magnetized to saturation under an external magnetic field, these ferromagnetic tips, which reside atop each CNT, can be used to actuate the entire membrane on which the nanotubes are grown. Magnetic modeling is performed to analyze the magnetic properties of the teardrop-shaped CNT tips, and initial experimental results show that magnetic torques and forces arising from the CNT tips are sufficient to rotate the membrane up to 180° and keep it latched without springing back.Multiwalled carbon nanotubes (CNTs) with nickel and cobalt catalyst tips have been grown on foldable titanium nitride membranes. Once magnetized to saturation under an external magnetic field, these ferromagnetic tips, which reside atop each CNT, can be used to actuate the entire membrane on which the nanotubes are grown. Magnetic modeling is performed to analyze the magnetic properties of the teardrop-shaped CNT tips, and initial experimental results show that magnetic torques and forces arising from the CNT tips are sufficient to rotate the membrane up to 180° and keep it latched without springing back.

The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures

Nanostructured Origami 3D Fabrication and Assembly Process is a method of manufacturing 3D nanostructured devices using exclusively 2D micro- and nanofabrication techniques. The origami approach consists of first patterning a large 2D membrane and then folding the membrane along predefined regions to obtain the final 3D configuration. We report on the materials, actuation, and modeling aspects of building an origami structure. Experimental results from fabricated devices as well as future applications of the technique are also presented.

Assembling nanoparticle catalysts with nanospheres for periodic carbon nanotube structure growth.

We have developed a novel method to grow carbon nanotubes in a periodic structure using a simple one-step self-assembly process. In this approach, monodispersed nanospheres are utilized to assemble smaller nanoparticle catalysts into an ordered periodic pattern. Using this process, we have grown carbon nanotube bundles into a honeycomb structure. The proposed method eliminates the need for lithography and material deposition, greatly reducing the fabrication complexity and cost.

Nanostructured Origami/sup /spl trade// 3D fabrication and assembly of electrochemical energy storage devices

Using the Nanostructured Origami/sup /spl trade// 3D Fabrication and Assembly Process, 3D nanostructured devices can be made from exclusively 2D micro- and nanofabrication tools. The origami approach consists of first patterning large 2D membranes and then folding them along predefined regions to obtain the desired 3D configuration. State-of-the art nanopatterning tools can be integrated into the process, and batch-fabrication can be achieved via several actuation methods that allow automated, parallel manipulation of the 2D segments. This paper reports on the application of the origami method to the fabrication of a supercapacitor, a type of an electrochemical energy storage device. The advantages of utilizing the 3rd dimension and nanostructured surfaces in such devices will be discussed.

Nanomanufacturing of carbon nanotubes on titanium nitride

Carbon nanotubes (CNTs), in particular the vertically-aligned variety grown through a PECVD-based process, are highly versatile nanostructures that can be used in a variety of nanomanufacturing applications. However, process and material compatibility issues have prevented the nanotubes from becoming more fully integrated into various micro- and nanomanufacturing applications. In this paper, we discuss the use of a folding titanium nitride membrane layer to more easily combine the nanotube growth process with other nanomanufacturing schemes, such as Nanostructured OrigamiTM (In et al., 2006).

Nanostructured Origami (Trademark) 3D Fabrication and Self Assembly Process for Soldier Combat Systems

Abstract : The Nanostructured Origami(Trademark) 3D Fabrication and Assembly Process is a method of manufacturing 3D nanosystems using exclusively 2D lithography tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation and modeling aspects of the manufacturing process, and present results from fabricated structures.

Three-Dimensional, Nanostructured Electrochemical Energy Storage Devices

UINTRODUCTIONU – The next generation of microsystems will require an integrated power storage device in order to fully make use of the tremendous advances made in microand nanoscale fabrication technology. However, due to the high cost, high processing complexity, and low capacity of currently available solutions, an external source of power is often requiredPP. In this paper we present a method for assembling energy storage devices for microsystems using the Nanostructured OrigamiTM technique. The Nanostructured OrigamiTM process was developed as a novel method of creating threedimensional (3D) nanostructured devices using twodimensional microand nanopatterning techniques. The origami fabrication method is a two-part process in which two-dimensional (2D) membranes are first patterned and then folded into the desired 3D configuration. This fabrication scheme is ideal for creating integrated, electrochemical energy storage for several reasons. First, integration with currently existing microsystems becomes feasible because the entire process is performed using standard 2D microand nanofabrication tools. Second, the addition of 3D geometry and nanoarchitecture, enabled by the origami process, allows high performance electrochemical energy storage devices to be fabricated within a small volume and assembled with other functional 3D elements (e.g. micro-actuators). This paper reports the construction of electrochemical capacitors or supercapacitors using the Nanostructured OrigamiTM method and preliminary electrochemical testing results. A supercapacitor was chosen for its reduced fabrication complexity and ability to be enhanced via 3D geometry and nanoarchitecture. The paper will discuss the advantages and the challenges in using SU-8, a robust, epoxy-type photoresist, as the structural membrane material of the origami fabricated supercapacitor.

Origami Fabrication of SU-8 Supercapacitors

The Nanostructured Origami™ 3D Fabrication and Assembly Process was developed as a novel method of creating three-dimensional (3D) nanostructured devices using two-dimensional micro- and nanopatterning tools and techniques. The origami method of fabrication is a two-part process in which two-dimensional (2D) membranes are first patterned and then folded into the desired 3D configuration. This paper reports on the use of the Nanostructured Origami™ process to create a functional electrochemical energy storage device. An electrochemical capacitor, or a supercapacitor, is selected because its performance can be readily improved by the addition of 3D geometry and nanoarchitecture. In addition to improved performance, the origami fabrication method allows such devices to be integrated into preexisting MEMS and IC processes, thus enabling the fabrication of complete micro- and nanosystems with an integrated power supply. The supercapacitors were created by selectively depositing carbon-based electrode materials on the SU-8 membrane and then folding the structure so that oppositely-charged electrode regions face each other in a 3D arrangement. The fabrication process, electrochemical testing procedure, and analysis of the results are presented.Copyright