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Ichimura Satoshi

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Publication

Featured researches published by Ichimura Satoshi.

Archive | 2002

ION BEAM DISTRIBUTION CONTROL METHOD AND ION BEAM PROCESSING APPARATUS

Tsuchiya Kazutoshi; Ichimura Satoshi

Archive | 2000

ION MILLING DEVICE, ION MILLING METHOD, ION BEAM IRRADIATION DEVICE AND ION BEAM IRRADIATION METHOD

Minami Hiroaki; Ichimura Satoshi; Oishi Seitaro; Moriyama Masamichi

Archive | 1995

DC MAGNETRON SPUTTERING METHOD AND DEVICE THEREFOR

Kiyono Tomoyuki; Sato Tadashi; Ichimura Satoshi; Chiyabara Kenichi

Archive | 2001

Device and method for processing neutral beam

Ichimura Satoshi; Tsuchiya Kazutoshi; Sato Tadashi; Nagamine Yoshihiko; Higuchi Yoshiya

Archive | 1997

PLASMA TREATMENT DEVICE, AND PLASMA TREATMENT METHOD USING IT

Ichimura Satoshi; Sato Tadashi; Hashimoto Isao

Archive | 2003

METHOD AND DEVICE FOR ION SEPARATION AND ION TRAPPING, AND METHOD AND DEVICE FOR ION DETECTION USING THEM

Ichimura Satoshi; Sato Tadashi; Tsuchiya Kazutoshi

Archive | 2001

METHOD OF CLEANING LEAD-OUT ELECTRODE AND ION BEAM TREATMENT APPARATUS

Ichimura Satoshi; Tsuchiya Kazutoshi; Sato Tadashi

Archive | 2002

TREATMENT SUBSTRATE FOR ELECTROSTATIC CHUCK

Ogura Satoshi; Ichimura Satoshi; Kurogane Masaharu; Saruta Hikari

Archive | 2002

METHOD FOR CONTROLLING AMOUNT OF ETCHING IN DRY ETCHING PROCESS AND DRY ETCHING APPARATUS

Ichimura Satoshi; Tsuchiya Kazutoshi

Archive | 1996

ION-BEAM TREATING DEVICE

Ichimura Satoshi; Sato Tadashi; Kobayashi Kenzo; Oishi Seitaro; Onuki Hisao

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Natsui Kenichi

Toshiba

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