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Dive into the research topics where Igor Petrov is active.

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Featured researches published by Igor Petrov.


International Symposium on Optical Science and Technology | 2001

Theoretical analysis of achromatic deflectors

Igor Petrov; T. Y. Fishkova; L. P. Ovsyannikova

An electromagnetic system with matching centers of deflection in any arbitrary direction of charged particle beam is proposed. Analytical expressions for electrostatic and magnetic scalar potential distributions for such systems made of four, six and eight electrodes-poles were obtained in two-dimensional approximation. Values of feeding potential needed for improvement of field homogeneity were found for the six electrode-pole systems. Conditions of the first order achromatism for the deflecting, focusing and correcting systems with the transversal fields have been written in general form. Edge field distribution along optical axis has been calculated numerically for finite length deflectors and empirical formula approximating this distribution has been derived. Beam central trajectory parameters were calculated for electrostatic, magnetic and for systems with common ratio of the electrostatic and magnetic components, providing achromatic deflection in small work region. Other ratios of these components providing expansion of region of the achromatic deflection up to 200-250 and high er degree of the linear deflection were found. Advantages of the proposed deflectors are described.


Archive | 2004

Charged particle beam column and method of its operation

Igor Petrov; Pavel Adamec; Zvika Rosenberg


Archive | 2002

CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR INSPECTING SAMPLES

Igor Petrov; Zvika Rosenberg


Archive | 1999

Method and system for the examination of specimen using a charged particle beam

Alex Goldenshtein; Radel Ben-Av; Asher Pearl; Igor Petrov; Nadav Haas; Pavel Adamec; Yaron I. Gold


Archive | 2002

Deflection method and system for use in a charged particle beam column

Igor Petrov; Igor Krivts; Zvika Rosenberg; Pavel Adamec


Archive | 2003

Method and system for use in the monitoring of samples with a charged particles beam

Igor Petrov; Zvika Rosenberg; Pavel Adamec; Igor Krayvitz


Archive | 2000

Focusing assembly and method for a charged particle beam column

Igor Petrov; Bezalel Rechav


Archive | 2004

Objective lens arrangement for use in a charged particle beam column

Igor Petrov


Archive | 2002

Charged particle beam column and method for directing a charged particle beam

Igor Petrov; Zvika Rosenberg


Archive | 2004

Beam directing system and method for use in a charged particle beam column

Igor Petrov; Igor Krivts; Albert Karabekov

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