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Dive into the research topics where Igor V. Peidous is active.

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Featured researches published by Igor V. Peidous.


international symposium on the physical and failure analysis of integrated circuits | 1997

Methodology for ULSI LOCOS isolation built-in reliability analysis

Konstantin V. Loiko; Igor V. Peidous; Hok-Min Ho; E.K.B. Quek; D.H.Y. Lim

The results of studying the mechanisms of CMOS ULSI LOCOS isolation failures and an effective approach to qualifying the technological processes of isolation manufacturing are presented. The described method for reliability analysis allows one to reveal the potential capability of a current technology.


Microelectronic device technology. Conference | 1997

Narrow-channel transistor threshold self-adjustment technique for ULSI with LOCOS isolation

Konstantin V. Loiko; Igor V. Peidous; Hok-Min Ho; John F. Bromley-Barratt; Elgin T. Quek; David Hsuan Yu Lim

A method for the compensation of the narrow-width effect of local oxidation and the self-adjustment of the narrow-channel transistor threshold voltage is proposed. The method enables the significant improvement of the device characteristics and isolation performance.


Archive | 1999

Shallow trench isolation of MOSFETS with reduced corner parasitic currents

Igor V. Peidous


Archive | 1999

Method of filling shallow trenches

Vladislav Vassiliev; Igor V. Peidous


Archive | 1999

Method for making sub-quarter-micron MOSFET

Igor V. Peidous


Archive | 1998

Method of shallow trench isolation

Henry Gerung; Igor V. Peidous; Thomas Schuelke; Andrew Kuswatno


Archive | 1997

Locos with bird's beak suppression by a nitrogen implantation

Igor V. Peidous


Archive | 1998

Narrow deep trench isolation process with trench filling by oxidation

Igor V. Peidous


Archive | 1998

Method and mask structure for self-aligning ion implanting to form various device structures

Igor V. Peidous


Archive | 2000

Locos mask for suppression of narrow space field oxide thinning and oxide punch through effect

Igor V. Peidous; Quek Elgin; Konstantin V. Loiko; Tan Poh Suan; Vijai Kumar Chhagan

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Konstantin V. Loiko

Chartered Semiconductor Manufacturing

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Andrew Kuswatno

Chartered Semiconductor Manufacturing

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David Hsuan Yu Lim

Chartered Semiconductor Manufacturing

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David Yeo Yong Hock

Chartered Semiconductor Manufacturing

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Elgin Quek

Chartered Semiconductor Manufacturing

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Elgin T. Quek

Chartered Semiconductor Manufacturing

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Henry Gerung

Chartered Semiconductor Manufacturing

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Hok-Min Ho

Chartered Semiconductor Manufacturing

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John F. Bromley-Barratt

Chartered Semiconductor Manufacturing

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Quek Elgin

Chartered Semiconductor Manufacturing

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