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Iida Shigehira

Canon Inc.

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Publication

Featured researches published by Iida Shigehira.

Archive | 1988

Microwave plasma cvd device having improved microwave introducing window

Iida Shigehira; Arai Takashi; Hashizume Junichiro; Takei Tetsuya; Saito Keishi

Archive | 1985

APPARATUS FOR PRODUCING DEPOSITED FILM

Kurokawa Takeshi; Tsuezuki Yoshio; Takei Tetsuya; Iida Shigehira

Archive | 1987

ACCUMULATED FILM FORMATION DEVICE

Iida Shigehira; Misumi Teruo; Kurokawa Takeshi; Kato Minoru; Kawamura Takahisa

Archive | 1987

Verfahren zur Bildung funktioneller aufgedampfter Filme durch ein chemisches Mikrowellen-Plasma-Aufdampfverfahren

Saitoh Keishi; Hashizume Junichiro; Iida Shigehira; Takei Tetsuya; Arai Takayoshi

Archive | 1988

FORMATION OF FUNCTIONAL DEPOSITED FILM BY MICROWAVE PLASMA CVD

Arai Takashi; Iida Shigehira; Saito Keishi; Hashizume Junichiro; Takei Tetsuya

Archive | 1987

DISCHARGE DEVICE FOR SEMICONDUCTOR PRODUCTION

Iida Shigehira; Kurokawa Takeshi; Arai Takashi; Kato Minoru; Yamazaki Itaru; Yoshino Toshihito

Archive | 1987

DEPOSITION FILM FORMING DEVICE

Misumi Teruo; Iida Shigehira; Kato Minoru; Takei Tetsuya

Archive | 1988

DEVICE FOR MICROWAVE CVD

Hashizume Junichiro; Iida Shigehira; Arai Takashi; Takei Tetsuya; Saito Keishi

Archive | 1987

WASTE POWDER TREATING DEVICE

Iida Shigehira; Kurokawa Takeshi; Arai Takashi; Kato Minoru; Yamazaki Itaru; Yoshino Toshihito

Archive | 1985

Equipment for removing secondary powdered product in semiconductor manufacturing by reaction of silane group gas decomposition

Iida Shigehira; Kurokawa Takeshi; Arai Takashi; Kato Minoru; Yamazaki Itaru; Yoshino Toshihito

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Takei Tetsuya

Canon Inc.

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Hashizume Junichiro

Canon Inc.

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Kato Minoru

Canon Inc.

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Saito Keishi

Canon Inc.

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Misumi Teruo

Canon Inc.

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Arai Takayoshi

Canon Inc.

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Ogawa Kyosuke

Canon Inc.

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Saitoh Keishi

Canon Inc.

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