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Inada Yasuo

East Tennessee State University

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Publication

Featured researches published by Inada Yasuo.

Archive | 1993

METHOD AND APPARATUS FOR PLANARIZATION POLISHING OF WAFER WITH DEVICE

Doi Toshiro; Nakagawa Takeo; Kasai Toshio; Ichikawa Koichiro; Inada Yasuo

Archive | 1997

POLISHING DEVICE FOR WAFER

Kudo Norio; Inada Yasuo; Nakajima Makoto; Fukushima Masanori

Archive | 1996

MIRROR FINISHED SURFACE POLISHING METHOD FOR WAFER CHAMFERING PART AND MIRROR FINISHED SURFACE POLISHING DEVICE

Hasegawa Fumihiko; Otani Tatsuo; Kuroda Yasuyoshi; Ichikawa Koichiro; Inada Yasuo

Archive | 1993

METHOD FOR GRINDING WAFER AND TOP RING THEREFOR

Ichikawa Koichiro; Inada Yasuo; Tsukada Makoto; Tanaka Koichi

Archive | 1996

METHOD AND DEVICE FOR POLISHING WORKPIECE

Kasai Toshio; Doi Toshiro; Ichikawa Koichiro; Inada Yasuo

Archive | 1995

P0LISHING DEVICE FOR WAFER OUTER CIRCUMFERENTIAL PART

Hasegawa Fumihiko; Otani Tatsuo; Kuroda Yasuyoshi; Ichikawa Koichiro; Inada Yasuo

Archive | 1994

POLISHING DEVICE PROVIDED WITH WORK POSITIONING MECHANISM

Tanaka Koichi; Hashimoto Hiromasa; Inada Yasuo; Nakajima Makoto

Archive | 1991

WAFER MACHINING DEVICE

Ichikawa Koichiro; Inada Yasuo

Archive | 2002

Verfahren und Vorrichtung zum Hochglanzpolieren von Fasen eines Wafers mit einer Orientierungs-Aufflachung

Ichikawa Koichiro; Inada Yasuo; Hasegawa Fumihiko; Kuroda Yasuyoshi; Tsuchiya Toshihiro

Archive | 2001

PLANARIZATION POLISHING METHOD AND EQUIPMENT FOR WAFER WITH DEVICE

Doi Toshiro; Nakagawa Takeo; Kasai Toshio; Ichikawa Koichiro; Inada Yasuo

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Ichikawa Koichiro

East Tennessee State University

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Hasegawa Fumihiko

East Tennessee State University

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Kuroda Yasuyoshi

East Tennessee State University

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Doi Toshiro

Kyushu University

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Hashimoto Hiromasa

East Tennessee State University

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Ohtani Tatsuo

East Tennessee State University

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Tsuchiya Toshihiro

East Tennessee State University

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