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Inaki Kyoichi

East Tennessee State University

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Publication

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Archive | 1999

Quartz glass member for use in dry etching and dry etching system equipped with the same

Inaki Kyoichi

Archive | 1996

SILICA GLASS JIG

Inaki Kyoichi; Segawa Tohru; Yoshida Nobumasa; Endo Mamoru

Archive | 2002

QUARTZ GLASS AND QUARTZ GLASS JIG AND PRODUCTION THEREOF

Fujinoki Akira; Inaki Kyoichi; Sato Tatsuhiro; Shirai Tomoyuki; Ueda Tetsuji; Yoshida Nobumasa

Archive | 2001

Semiconductor industry-use silica glass jig and production method therefor

Segawa Tohru; Sato Tatsuhiro; Maruko Yoichiro; Inaki Kyoichi

Archive | 1991

Optisches Bauteil aus hochreinem und transparentem, synthetischem Quarzglas und Verfahren zu seiner Herstellung und sein Rohling

Yamagata Shigeru; Kuriyama Michiyou; Inaki Kyoichi; Takke Ralf

Archive | 1990

Optische Teile und Rohlinge aus synthetischem Siliziumdioxidglas und Verfahren zu ihrer Herstellung

Yamagata Shigeru; Inaki Kyoichi; Matsuya Toshikatu; Takke Ralf; Thomas Stephan; Fabian Heinz

Archive | 2017

USE OF A QUARTZ GLASS MEMBER FOR PLASMA ETCHING

Sato Tatsuhiro; Inaki Kyoichi

Archive | 2014

A PILED CONSTRUCTION BODY OF HEAT-RESISTANT GLASS TUBE WITH A FLANGE, A HEAT-RESISTANT GLASS CONTAINER WITH A FLANGE AND MANUFACTURING METHOD THEREFOR

Inaki Kyoichi; Segawa Tohru

Archive | 2008

Artikel bestehend aus einem Glaskörper mit verbesserten Eigenschaften gegen Plasmakorrosion und Verfahren zu dessen Herstellung

Sato Tatsuhiro; Yoshida Nobumasa; Fujinoki Akira; Inaki Kyoichi; Shirai Tomoyuki

Archive | 2007

QUARZGLAS-HALTEVORRICHTUNG MIT GROSSEN OBERFLÄCHENUNREGELMÄSSIGKEITEN

Inaki Kyoichi

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Collaboration

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Segawa Tohru

East Tennessee State University

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Sato Tatsuhiro

East Tennessee State University

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Fujinoki Akira

East Tennessee State University

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Takke Ralf

East Tennessee State University

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Yamagata Shigeru

East Tennessee State University

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Fabian Heinz

East Tennessee State University

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Hayashi Naoki

East Tennessee State University

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Kuriyama Michiyou

East Tennessee State University

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Matsuya Toshikatu

East Tennessee State University

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Thomas Stephan

East Tennessee State University

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