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Isao Uchiyama

East Tennessee State University

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Publication

Featured researches published by Isao Uchiyama.

Archive | 1992

Automatic cleaning apparatus for wafers

Hideo Kudo; Isao Uchiyama; Yoshiharu Kimura; Morie Suzuki; Takashi Tanakajima

Archive | 1994

Wafer cleaning tank

Hideo Kudo; Isao Uchiyama

Archive | 1995

Brush cleaning apparatus and cleaning system for disk-shaped objects using same

Isao Uchiyama; Masami Ryokuhu-Ryo Nakano; Hiroyuki Takamatu; Morie Suzuki

Archive | 1994

Method for handling or processing semiconductor wafers

Hideo Kudo; Isao Uchiyama; Yoshiharu Kimura; Morie Suzuki; Takashi Tanakajima

Archive | 1996

Method of purifying alkaline solution and method of etching semiconductor wafers

Isao Uchiyama; Hiroyuki Takamatsu; Toshio Ajito

Archive | 1995

Method for cleaning semiconductor silicon wafer

Masami Nakano; Isao Uchiyama; Hiroyuki Takamatsu

Archive | 2009

Carrier for double-side polishing apparatus, double-side polishing apparatus using the same, and double-side polishing method

Isao Uchiyama

Archive | 2006

Carrier for double-sided polishing device, double-sided polishing device using the same and double-sided polishing method

Isao Uchiyama; 勇雄 内山

Archive | 1996

ALKALI SOLUTION PURIFYING METHOD AND SEMICONDUCTOR WAFER ETCHING METHOD

Toshio Ajito; Hideo Kudo; Masami Nakano; Isao Uchiyama; 正己 中野; 勇雄 内山; 利夫 味戸; 秀雄 工藤

Archive | 1995

Method of cleaning silicon wafers in cleaning baths with controlled vertical surface oscillations and controlled in/out speeds

Masami Nakano; Isao Uchiyama; Hiroyuki Takamatsu; Morie Suzuki

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Hideo Kudo

East Tennessee State University

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Morie Suzuki

East Tennessee State University

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Masami Nakano

East Tennessee State University

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Hiroyuki Takamatsu

East Tennessee State University

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Masanao Sasaki

East Tennessee State University

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Takashi Tanakajima

East Tennessee State University

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Yoshiharu Kimura

East Tennessee State University

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Hiroyuki Takamatu

East Tennessee State University

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Toshio Ajito

East Tennessee State University

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Fumihiko Hasegawa

East Tennessee State University

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