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Ishii Mamoru

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Publication

Featured researches published by Ishii Mamoru.

Archive | 2003

POWER FEED TERMINAL OF AN ELECTROSTATIC CHUCK

Ishii Mamoru; Ogura Tomoyuki

Archive | 2004

VACUUM SUCKING DEVICE

Sasaki Shunichi; Ishino Tomohiro; Mori Masahiro; Ishii Mamoru; Shiogai Tatsuya

Archive | 2017

ELECTROSTATIC CHUCKING DEVICE

Umetsu Motohiro; Ishii Mamoru; Ishida Hironori; Wada Chiharu

Archive | 2005

ELECTROSTATIC CHUCK AND EXPOSURE APPARATUS

Ishida Hironori; Ishii Mamoru; Saito Kazunori; Sasaki Shunichi; Nakanishi Kazuho; Suzuki Hiroshi; Fujimoto Kenji; Yamamoto Hajime; Tanaka Keiichi

Archive | 2001

ELECTRICALLY CONDUCTIVE CERAMIC AND ITS PRODUCTION

Umetsu Motohiro; Ishii Mamoru; Ishida Hironori; Shirakawa Yoichi; Minamizawa Kazusuke; Matsuo Hiroyuki; Endo Sari; Kishi Yukio; Saito Kazunori; Suzuki Hiroshi

Archive | 2004

LOW THERMAL EXPANSION CERAMIC JUNCTION BODY

Ishii Mamoru; Iguchi Masahito; Kataoka Masako; Umetsu Motohiro; Nakamura Hiroaki

Archive | 2007

BLACK LOW RESISTANCE CERAMIC AND MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE

Nakamura Hiroaki; Ishii Mamoru; Ogura Tomoyuki

Archive | 2005

STATIC PRESSURE BEARING DEVICE AND ITS MANUFACTURING METHOD

Umetsu Motohiro; Sato Shinya; Ishii Mamoru; Iguchi Masahito

Archive | 2004

LOW THERMAL EXPANSION CERAMIC AND METHOD OF MANUFACTURING THE SAME

Iguchi Masahito; Sugaya Tomoyuki; Kataoka Masako; Umetsu Motohiro; Nakamura Hiroaki; Ishii Mamoru

Archive | 2004

METHOD FOR MANUFACTURING LOW THERMAL EXPANSION CERAMIC

Nakamura Hiroaki; Ishii Mamoru; Iguchi Masahito; Kataoka Masako; Umetsu Motohiro; Ishida Hironori

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