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Ito Shinichi

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Publication

Featured researches published by Ito Shinichi.

Archive | 2002

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD USING THE SAME

Sakurai Hideaki; Itoh Masamitsu; Ito Shinichi

Archive | 1997

MASK FOR EXPOSURE AND ITS PRODUCTION

Ito Shinichi; Kaqano Kenji; Inoue Soichi; Tanaka Satoshi

Archive | 1998

METHOD OF FABRICATING SEMICONDUCTOR DEVICE AND MASK FOR EXPOSURE

Kanai Hideki; Ito Shinichi

Archive | 2000

SUBSTRATE TREATING APPARATUS AND METHOD FOR TREATING SUBSTRATE USING THE SAME

Ito Shinichi; Okumura Katsuya

Archive | 1999

DEVICE AND METHOD FOR FORMING THIN FILM

Kitano Takahiro; Takeshita Kazuhiro; Okumura Katsuya; Kawano Kenji; Ito Shinichi

Archive | 2007

METHOD AND DEVICE OF TREATING SUBSTRATE

Shiobara Hideshi; Matsunaga Kentaro; Kawamura Daisuke; Takeishi Tomoyuki; Hayazaki Kei; Ito Shinichi

Archive | 2006

APPLICATION INSPECTION METHOD AND OIL IMMERSION EXPOSURE METHOD

Matsunaga Kentaro; Ito Shinichi

Archive | 2002

HEATER FOR APPLIED FILM, METHOD AND DEVICE FOR PROCESSING RESIST FILM AND METHOD FOR FORMING RESIST PATTERN

Kawano Kenji; Ito Shinichi; Hayazaki Kei; Shiobara Hideshi; Kawamura Daisuke

Archive | 2005

PATTERNING METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Kondo Takehiro; Shiobara Hideshi; Takeishi Tomoyuki; Chiba Kenji; Ito Shinichi

Archive | 2005

CHEMICAL CERTIFYING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR APPARATUS

Ito Shinichi; Shiobara Hideshi

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Collaboration

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Kawano Kenji

Alps Electric

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Okumura Katsuya

Toshiba

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Sakurai Hideaki

Toshiba

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Itoh Masamitsu

Toshiba

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Sato Hiroyuki

Alps Electric

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