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Itsuki Kobata

Ebara Corporation

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Publication

Featured researches published by Itsuki Kobata.

Archive | 2007

Electrolytic liquid for electrolytic polishing and electrolytic polishing method

Akira Kodera; Yasushi Toma; Tsukuru Suzuki; Takayuki Saito; Itsuki Kobata

Archive | 2008

Electrochemical mechanical polishing apparatus conditioning method, and conditioning solution

Itsuki Kobata; Yasushi Toma; Akira Kodera; Tsukuru Suzuki; Yuji Makita; Takayuki Saito

Archive | 2006

Polishing pad and polishing apparatus

Itsuki Kobata; Tatsuya Kohama

Archive | 2008

Electrochemical mechanical polishing method and electrochemical mechanical polishing apparatus

Itsuki Kobata; Akira Kodera; Yasushi Toma; Tsukuru Suzuki; Takayuki Saito; Yuji Makita; Hirokuni Hiyama

Archive | 2016

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

Kuniaki Yamaguchi; Toshio Mizuno; Itsuki Kobata; Mitsuru Miyazaki; Naoki Toyomura; Takuya Inoue

Archive | 2018

HEAD HEIGHT ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS PROVIDED WITH HEAD HEIGHT ADJUSTMENT DEVICE

Suguru Sakugawa; Toru Maruyama; Nobuyuki Takahashi; Zhongxin Wen; Yoichi Shiokawa; Keita Yagi; Itsuki Kobata; Tomohiko Takeuchi

Archive | 2016

BUFF PROCESSING MODULE, SUBSTRATE PROCESSING APPARATUS, AND BUFF PAD CLEANING METHOD

Mitsuru Miyazaki; Takuya Inoue; Naoki Toyomura; Toshio Mizuno; Kuniaki Yamaguchi; Itsuki Kobata

Archive | 2016

基板処理装置、基板処理システム、および基板処理方法

小畠 厳貴; Itsuki Kobata; 圭太 八木; Keita Yagi; 陽一 塩川; Yoichi Shiokawa

Archive | 2016

BUFFING APPARATUS, AND SUBSTRATE PROCESSING APPARATUS

Kuniaki Yamaguchi; Toshio Mizuno; Itsuki Kobata

Archive | 2008

Method for regenerating ion exchanger

Takayuki Saito; Tsukuru Suzuki; Yuji Makita; Kaoru Yamada; Masayuki Kumekawa; Hozumi Yasuda; Osamu Nabeya; Kazuto Hirokawa; Mitsuhiko Shirakashi; Yasushi Toma; Itsuki Kobata

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Collaboration

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Takayuki Saito

Ebara Corporation

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Tsukuru Suzuki

Ebara Corporation

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Yasushi Toma

Ebara Corporation

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Akira Kodera

Ebara Corporation

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Kuniaki Yamaguchi

Ebara Corporation

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Toshio Mizuno

Ebara Corporation

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Yuji Makita

Ebara Corporation

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Hozumi Yasuda

Ebara Corporation

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Kazuto Hirokawa

Ebara Corporation

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Keita Yagi

Osaka University

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