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Dive into the research topics where Itsuki Kobata is active.

Publication


Featured researches published by Itsuki Kobata.


Archive | 2007

Electrolytic liquid for electrolytic polishing and electrolytic polishing method

Akira Kodera; Yasushi Toma; Tsukuru Suzuki; Takayuki Saito; Itsuki Kobata


Archive | 2008

Electrochemical mechanical polishing apparatus conditioning method, and conditioning solution

Itsuki Kobata; Yasushi Toma; Akira Kodera; Tsukuru Suzuki; Yuji Makita; Takayuki Saito


Archive | 2006

Polishing pad and polishing apparatus

Itsuki Kobata; Tatsuya Kohama


Archive | 2008

Electrochemical mechanical polishing method and electrochemical mechanical polishing apparatus

Itsuki Kobata; Akira Kodera; Yasushi Toma; Tsukuru Suzuki; Takayuki Saito; Yuji Makita; Hirokuni Hiyama


Archive | 2016

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

Kuniaki Yamaguchi; Toshio Mizuno; Itsuki Kobata; Mitsuru Miyazaki; Naoki Toyomura; Takuya Inoue


Archive | 2018

HEAD HEIGHT ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS PROVIDED WITH HEAD HEIGHT ADJUSTMENT DEVICE

Suguru Sakugawa; Toru Maruyama; Nobuyuki Takahashi; Zhongxin Wen; Yoichi Shiokawa; Keita Yagi; Itsuki Kobata; Tomohiko Takeuchi


Archive | 2016

BUFF PROCESSING MODULE, SUBSTRATE PROCESSING APPARATUS, AND BUFF PAD CLEANING METHOD

Mitsuru Miyazaki; Takuya Inoue; Naoki Toyomura; Toshio Mizuno; Kuniaki Yamaguchi; Itsuki Kobata


Archive | 2016

基板処理装置、基板処理システム、および基板処理方法

小畠 厳貴; Itsuki Kobata; 圭太 八木; Keita Yagi; 陽一 塩川; Yoichi Shiokawa


Archive | 2016

BUFFING APPARATUS, AND SUBSTRATE PROCESSING APPARATUS

Kuniaki Yamaguchi; Toshio Mizuno; Itsuki Kobata


Archive | 2008

Method for regenerating ion exchanger

Takayuki Saito; Tsukuru Suzuki; Yuji Makita; Kaoru Yamada; Masayuki Kumekawa; Hozumi Yasuda; Osamu Nabeya; Kazuto Hirokawa; Mitsuhiko Shirakashi; Yasushi Toma; Itsuki Kobata

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