J. C. Tokash

Local oxidation of metal and metal nitride films

Oxide growth on sputter-deposited thin films is studied on the local scale by atomic force microscope (AFM)-assisted lithography. We investigate the group IV reactive metals Zr, Hf, Ti, and their nitrides. The nitrogen content of the deposition plasma affects the film crystal structure and electrical resistivity, which in turn alter the local oxidation rates. Mass transport plays an important role, producing features with heights ranging from a few nanometers up to hundreds of nanometers. The heights of the largest features are one to two orders of magnitude greater than observed in other material systems, and the growth is well controlled. We use various techniques to investigate the solid-state reaction and transport mechanisms involved in this oxidation driven by a highly localized electric field. Our results demonstrate the potential of AFM lithographic techniques for characterizing oxidation processes across a wide range of time and length scales.Oxide growth on sputter-deposited thin films is studied on the local scale by atomic force microscope (AFM)-assisted lithography. We investigate the group IV reactive metals Zr, Hf, Ti, and their nitrides. The nitrogen content of the deposition plasma affects the film crystal structure and electrical resistivity, which in turn alter the local oxidation rates. Mass transport plays an important role, producing features with heights ranging from a few nanometers up to hundreds of nanometers. The heights of the largest features are one to two orders of magnitude greater than observed in other material systems, and the growth is well controlled. We use various techniques to investigate the solid-state reaction and transport mechanisms involved in this oxidation driven by a highly localized electric field. Our results demonstrate the potential of AFM lithographic techniques for characterizing oxidation processes across a wide range of time and length scales.

Erbia-modified electrospun titania nanofibres for selective infrared emitters

Tetraisopropyl titanate (TPT) was mixed with a solution of polyvinylpyrrolidone (PVP) and the solution electrospun into nanofibres. Thermal annealing at 900 °C was used to pyrolyse the PVP, leaving nanofibres of rutile-phase titania. Erbium (III) oxide particles were also added into the solution before electrospinning, and selectively modified the near-infrared optical properties of the titania nanofibres as verified by both absorption and emission spectra. We thereby demonstrate the production of high-temperature optically functionalized nanostructures that can be used in a thermophotovoltaic energy conversion system.

Temperature programmed desorption study of C6H12∕Zr(0001)

Temperature programmed desorption (TPD) has been used to investigate the behavior of cyclohexane (C6H12) on Zr(0001) and the effects of 500eV electron bombardment on its desorption characteristics. Following adsorption at 150K, molecular desorption above 600K suggests exceptionally strong interaction between C6H12 and Zr(0001). These high-temperature desorption features shift to higher temperatures with increasing exposure. Electron bombardment alters TPD profiles and results in small quantities of H2 desorption from C6H12∕Zr(0001) at about 310K.