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Dive into the research topics where J. Neil Greeley is active.

Publication


Featured researches published by J. Neil Greeley.


Archive | 2008

Methods of removing silicon oxide and gaseous mixtures for achieving same

Mark Kiehlbauch; J. Neil Greeley; Paul A. Morgan


Archive | 2009

Methods for selective permeation of self-assembled block copolymers with metal oxides, methods for forming metal oxide structures, and semiconductor structures including same

Dan B. Millward; Timothy A. Quick; J. Neil Greeley


Archive | 2008

Method for selectively permeating a self-assembled block copolymer, method for forming metal oxide structures, method for forming a metal oxide pattern, and method for patterning a semiconductor structure

Dan B. Millward; Timothy A. Quick; J. Neil Greeley


Archive | 2011

Semiconductor structures including polymer material permeated with metal oxide

Dan B. Millward; Timothy A. Quick; J. Neil Greeley


Archive | 2008

Methods of removing silicon oxide

Mark Kiehlbauch; J. Neil Greeley; Paul A. Morgan


Archive | 2014

Semiconductor device structures including metal oxide structures, and related methods of forming semiconductor device structures

Dan B. Millward; Timothy A. Quick; J. Neil Greeley


Archive | 2008

Compositions and methods for substantially equalizing rates at which material is removed over an area of a structure or film that includes recesses or crevices

Nishant Sinha; J. Neil Greeley


Archive | 2012

Wet etchants including at least one etch blocker

Nishant Sinha; J. Neil Greeley


Archive | 2012

Ammonium fluoride chemistries

Mark Kiehlbauch; J. Neil Greeley; Paul A. Morgan


Archive | 2013

METHODS OF FORMING SEMICONDUCTOR DEVICE STRUCTURES, AND METHODS OF FORMING CAPACITOR STRUCTURES

Dan B. Millward; J. Neil Greeley

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