James Carriere

Thin infrared imaging systems through multichannel sampling

The size of infrared camera systems can be reduced by collecting low-resolution images in parallel with multiple narrow-aperture lenses rather than collecting a single high-resolution image with one wide-aperture lens. We describe an infrared imaging system that uses a three-by-three lenslet array with an optical system length of 2.3 mm and achieves Rayleigh criteria resolution comparable with a conventional single-lens system with an optical system length of 26 mm. The high-resolution final image generated by this system is reconstructed from the low-resolution images gathered by each lenslet. This is accomplished using superresolution reconstruction algorithms based on linear and nonlinear interpolation algorithms. Two implementations of the ultrathin camera are demonstrated and their performances are compared with that of a conventional infrared camera.

Measurement of waveguide birefringence using a ring resonator

A simple method for accurately measuring the birefringence of a ring resonator waveguide using its resonant characteristics is presented. A measurement accuracy of 1/spl times/10/sup -6/ is observed. This approach is then used to measure the effect of thermal annealing on the level of birefringence in an ion-exchanged waveguide.

An integrated optic gyroscope using ion-exchanged waveguides

We present a compact, low cost, integrated optic gyroscope fabricated by ion exchange in glass with a shot noise limited rotational sensitivity /spl sim/170 degrees/hr at 1 second integration time.

Measurement and modeling of ion-exchange parameters for IOG-10 glass

Accurate knowledge of the diffusion coefficients of an ion-exchange glass is crucial for the design, simulation, and optimization of optical waveguide structures created in the glass. We present the measurement of the Stewart coefficient, the maximum refractive index, and the diffusion coefficients for Ag + and Na + ions in IOG-10 glass. With knowledge of these glass properties, we can in turn control the optical and physical properties of the waveguides. Temperature dependence of the optical properties is also presented.

An improved process for manufacturing diffractive optical elements (DOEs) for off-axis illumination systems

We present advancements in the manufacture of high-performance diffractive optical elements (DOEs) used in stepper/scanner off-axis illumination systems. These advancements have been made by employing high resolution lithographic techniques, in combination with precision glass-etching capabilities. Enhanced performance of DOE designs is demonstrated, including higher efficiency with improved uniformity for multi-pole illumination at the pupil plane, while maintaining low on-axis intensity. Theoretical predictions of the performance for several classes of DOE designs will be presented and compared with experimental results. This new process capability results in improved performance of current DOE designs, and enables greater customization including control of the output spatial intensity distribution for future designs. These advancements will facilitate continuous improvements in off-axis illumination optimization required by the end user to obtain larger effective lithographic process windows.

Ultra-low frequency Stokes and anti-Stokes Raman spectroscopy at 785nm with volume holographic grating filters

We report the first results of ultra-low frequency Stokes and anti-Stokes Raman spectra at 785nm showing clearly resolved frequency shifts down to 10cm-1 from the excitation line, using commercially available ultra-narrow band notch and ASE suppression filters, and a single stage spectrometer. Near infra-red (NIR) wavelengths are of particular interest for Raman spectroscopy due to the reduced fluorescence observed for most materials. Previously reported attempts to produce ultra-low frequency Raman spectra at 785nm with volume holographic notch filters were largely unsuccessful, due to the fact that these ultra-narrow line notch filters and the wavelength of the laser must be very well matched to be effective. Otherwise, if the filters have any manufacturing errors or the laser wavelength is unstable, insufficient suppression of the Rayleigh scattered light will allow it to overwhelm the Raman signal. Recent improvements in both notch and ASE filters, wavelength-stabilized lasers, and optical system design have enabled low-frequency Raman spectra to be successfully taken at 785nm for several typical materials. Two ultra-narrow line notch filters formed as volume holographic gratings (VHGs) in glass with individually measured optical densities of 4.5 were used to block the Rayleigh scattered light from a matched VHG wavelength stabilized laser. Five discrete peaks below 100cm-1 were simultaneously observed for sulfur in both the Stokes and anti-Stokes regions at 28, 44, 52, 62, and 83cm-1. With no degradation in filter performance over time and extremely narrow spectral transition widths of less than 10cm-1, this relatively simple system is able to make ultra-low frequency Stokes and anti-Stokes Raman measurements at a fraction of the size and cost of traditional triple monochromator systems.

Advances in DOE modeling and optical performance for SMO applications

The introduction of source mask optimization (SMO) to the design process addresses an urgent need for the 32nm node and beyond as alternative lithography approaches continue to push out. To take full advantage of SMO routines, an understanding of the characteristic properties of diffractive optical elements (DOEs) is required. Greater flexibility in the DOE output is needed to optimize lithographic process windows. In addition, new and tighter constraints on the DOEs used for off-axis illumination (OAI) are being introduced to precisely predict, control and reduce the effects of pole imbalance and stray light on the CD budget. We present recent advancements in the modeling and optical performance of these DOEs.

THz-Raman: accessing molecular structure with Raman spectroscopy for enhanced chemical identification, analysis, and monitoring

Structural analysis via spectroscopic measurement of rotational and vibrational modes is of increasing interest for many applications, since these spectra can reveal unique and important structural and behavioral information about a wide range of materials. However these modes correspond to very low frequency (~5cm-1 - 200cm-1, or 150 GHz-6 THz) emissions, which have been traditionally difficult and/or expensive to access through conventional Raman and Terahertz spectroscopy techniques. We report on a new, inexpensive, and highly efficient approach to gathering ultra-low-frequency Stokes and anti-Stokes Raman spectra (referred to as “THz-Raman”) on a broad range of materials, opening potential new applications and analytical tools for chemical and trace detection, identification, and forensics analysis. Results are presented on explosives, pharmaceuticals, and common elements that show strong THz-Raman spectra, leading to clear discrimination of polymorphs, and improved sensitivity and reliability for chemical identification.

Enabling process window improvement at 45nm and 32nm with free-form DOE illumination

We present a method for optimizing a free-form illuminator implemented using a diffractive optical element (DOE). The method, which co-optimizes the source and mask taking entire images of circuit clips into account, improves the common process-window and 2-D image fidelity. We compare process-windows for optimized standard and free-form DOE illuminations for arrays and random placements of contact holes at the 45 nm and 32 nm nodes. Source-mask cooptimization leads to a better-performing source compared to source-only optimization. We quantify the effect of typical DOE manufacturing defects on lithography performance in terms of NILS and common process-window.

Advanced testing requirements of diffractive optical elements for off-axis illumination in photolithography

The progress of immersion lithography toward the 22nm production node is putting more stringent requirements on the diffractive optics that are used for off-axis illumination. Tighter tolerances on pole balance, stray light, zeroth order, optical transmission, and matching of the far field output pattern to the design specification are in-turn requiring more accurate and repeatable optical testing. This paper will report on preliminary results from Tesseras new excimer diffractive optics test stand, including gauge capability and sources of variation, ending with a comparison of measurement capability to the required specifications.