James E. Nulty

Method of etching an oxide layer

Probe card with an adapter layer for testing integrated circuits

Method for eliminating lateral spacer erosion on enclosed contact topographies during RF sputter cleaning

Method for forming a stable plasma

Probe card and method for constructing same

Plasma etch chemistry and method of improving etch control

Method of etching an oxide layer with simultaneous deposition of a polymer layer

Structure having reduced lateral spacer erosion

Electrostatic or mechanical chuck assembly conferring improved temperature uniformity onto workpieces held thereby, workpiece processing technology and/or apparatus containing the same, and method(s) for holding and/or processing a workpiece with the same

Method and structure for making self-aligned contacts