James M. Redmond

High-performance surface-micromachined inchworm actuator

This work demonstrates a polycrystalline silicon surface-micromachined inchworm actuator that exhibits high-performance characteristics such as large force (/spl plusmn/0.5 millinewtons), large velocity range (0 to /spl plusmn/4.4 mm/sec), large displacement range (/spl plusmn/100 microns), small step size (/spl plusmn/10, /spl plusmn/40 or /spl plusmn/100 nanometers), low power consumption (nanojoules per cycle), continuous bidirectional operation and relatively small area (600 /spl times/ 200/spl mu/m/sup 2/). An in situ load spring calibrated on a logarithmic scale from micronewtons to millinewtons, optical microscopy and Michelson interferometry are used to characterize its performance. The actuator consists of a force-amplifying plate that spans two voltage-controlled clamps, and walking is achieved by appropriately sequencing signals to these three components. In the clamps, normal force is borne by equipotential rubbing counterfaces, enabling friction to be measured against load. Using different monolayer coatings, we show that the static coefficient of friction can be changed from 0.14 to 1.04, and that it is load-independent over a broad range. We further find that the static coefficient of friction does not accurately predict the force generated by the actuator and attribute this to nanometer-scale presliding tangential deflections.

Active sensors for health monitoring of aging aerospace structures

A project to develop non-intrusive active sensors that can be applied on existing aging aerospace structures for monitoring the onset and progress of structural damage (fatigue cracks and corrosion) is presented. The state of the art in active sensors structural health monitoring and damage detection is reviewed. Methods based on (a) elastic wave propagation and (b) electro-mechanical (E/M) impedance technique are cited and briefly discussed. The instrumentation of these specimens with piezoelectric active sensors is illustrated. The main detection strategies (E/M impedance for local area detection and wave propagation for wide area interrogation) are discussed. The signal processing and damage interpretation algorithms are tuned to the specific structural interrogation method used. In the high frequency E/M impedance approach, pattern recognition methods are used to compare impedance signatures taken at various time intervals and to identify damage presence and progression from the change in these signatures. In the wave propagation approach, the acousto- ultrasonic methods identifying additional reflection generated from the damage site and changes in transmission velocity and phase are used. Both approaches benefit from the use of artificial intelligence neural networks algorithms that can extract damage features based on a learning process. Design and fabrication of a set of structural specimens representative of aging aerospace structures is presented. Three built-up specimens, (pristine, with cracks, and with corrosion damage) are used. The specimen instrumentation with active sensors fabricated at the University of South Carolina is illustrated. Preliminary results obtained with the E/M impedance method on pristine and cracked specimens are presented.

Distributed Sensing and Shape Control of Piezoelectric Bimorph Mirrors

Meeting the long term needs of the remote sensing community requires the development of large aperture space-based optical systems to achieve dramatic improvements in resolution and sensitivity. It is possible that ultralarge apertures will be obtained using deployable thin film mirror technology, yet many technological barriers must be overcome to make this approach viable. This paper summarizes an initial research effort into the development of piezoelectric thin film mirrors that can be actively shaped using electric fields applied by an electron flux at selected locations. Recent progress is described in the key areas of mirror figure sensing methods, electron gun excitation, and shape control algorithm development.

Vibration Control for Precision Manufacturing Using Piezoelectric Actuators

Piezoelectric actuators provide high frequency, force and stiffness capabilities along with reasonable stroke limits, all of which can be used to increase performance levels in precision manufacturing systems. This paper describes two examples of embedding piezoelectric actuators in structural components for vibration control. One example involves suppressing the self-excited chatter phenomenon in the metal cutting process of a milling machine and the other involves damping vibrations induced by rigid body stepping of a photolithography platen. Finite element modeling and analyses are essential for locating and sizing the actuators and permit further simulation studies of the response of the dynamic system. Experimental results are given for embedding piezoelectric actuators in a cantilevered bar configuration, which was used as a surrogate machine tool structure. These results are incorporated into a previously developed milling process simulation and the effect of the control on the cutting process stability diagram is quantified. Experimental results are also given for embedding three piezoelectric actuators in a surrogate photolithography platen to suppress vibrations. These results demonstrate the potential benefit that can be realized by applying advances from the field of adaptive structures to problems in precision manufacturing.

Chatter supression through variable impedance and smart fluids

A novel approach to mitigating chatter vibrations in machine tools is presented. Encountered in many types of metal removal processes, chatter is a dangerous condition which results from the interaction of the cutting dynamics with the modal characteristics of the machine- workpiece assembly. Tool vibrations are recorded on the surface of the workpiece during metal removal, imposing a waviness which alters the chip thickness during subsequent cutting passes. Deviations from the nominal chip thickness effect changes in the cutting force which, under certain conditions, can further excite vibrations. The chatter mitigation strategy presented is based on periodically altering the impedance of the cutting tool assembly. A cyclic electric (or magnetic) field is applied to the spindle quill which contains an electro- rheological (or magneto-rheological) fluid. The variable yield stress in the fluid affects the coupling of the spindle to the machine tool structure, changing the natural frequency of oscillation. Altering the modal characteristics in this fashion disrupts the modulation of current tool vibrations with previous tool vibrations recorded on the workpiece surface. Results from a simulated milling process reveal that significant reductions in vibration amplitude can be achieved through proper selection of fluid and excitation frequency.

Characterization of an inchworm actuator fabricated by polysilicon surface micromachining

We describe the design, fabrication, test and preliminary analysis of a polycrystalline silicon MEMS inchworm actuator fabricated in a five level surface micromachining process. Large force generation (500 micronewtons), large range of motion (+/- 100 microns), small area requirements (600 X 200 um), small step size (10, 40 or 120 nanometers), and a large velocity range (0 to 90 microns per second) are demonstrated. We characterize force with a load cell whose range is calibrated on a logarithmic scale from micronewtons to millinewtons. We characterize out-of-plane displacement with interferometry, and in-plane displacement with Moire metrology sensitive to approximately 60 nm. The actuator serves well for testing friction under conditions of well- known applied pressure. We found that our surfaces exhibited a static coefficient of friction (cof) of approximately 0.3, and a dynamic cof of approximately 0.2. We also present initial wear studies for this device.

Development of an active boring bar for increased chatter immunity

The development and initial evaluation of a prototype boring bar feature active vibration control for increased chatter immunity is described. The significance of active damping both normal and tangential to the workpiece surface is evaluated, indicating the need for two axis control to ensure adequate performance over expected variations in tool mounting procedures. The prototype tool features a commercially available boring bar modified to accommodate four PZT stack actuators for two axis bending control. Measured closed-loop dynamics are combined with a computer model of the boring process to simulate increased metal removal rate and improved workpiece surface finish through application of feedback control.

Friction measurement in MEMS using a new test structure

A MEMS test structure capable of measuring friction between polysilicon surfaces under a variety of test conditions has been refined from previous designs. The device is applied here to measuring friction coefficients of polysilicon surfaces under different environmental, loading, and surface conditions. Two methods for qualitatively comparing friction coefficients ({mu}) using the device are presented. Samples that have been coated with a self-assembled monolayer of the lubricating film perfluorinated-decyltrichorosilane (PFTS) have a coefficient of friction that is approximately one-half that of samples dried using super-critical CO{sub 2} (SCCO{sub 2}) drying. Qualitative results indicate that {mu} is independent of normal pressure. Wear is shown to increase {mu} for both supercritically dried samples and PFTS coated samples, though the mechanisms appear to be different. Super critically dried surfaces appear to degrade continuously with increased wear cycles, while PFTS coated samples reach a steady state friction value after about 10{sup 4} cycles.

Multiscale Roughness of MEMS Surfaces

Investigation of contact and friction at multiple length scales is necessary for the design of surfaces in sliding microelectromechanical system (MEMS). A method is developed to investigate the geometry of asperities at different length scales. Analysis of density, height, and curvature of asperities on atomic force microscopy (AFM) images of actual silicon MEMS surfaces show these properties have a power law relationship with the sampling size used to define an asperity. This behavior and its similarity to results for fractal Weierstrass-Mandelbrot (W-M) function approximations indicate that a multiscale model is required to properly describe the surfaces.© 2004 ASME

Nearly time-optimal feedback control of a magnetically levitated photolithography positioning system

This paper focuses on the development of an approximate time- optimal feedback strategy for conducting rest-to-rest maneuvers of a magnetically levitated table. Classical switching curves are modified to account for the complexities of magnetic actuation as well as the coupling of the rigid body modes through the control. A smooth blend of time-optimal and proportional-derivative controls is realized near the destination point to correct for inaccuracies produced by the approximate time-optimal strategy. Detailed computer simulations of the system indicate that this hybrid control strategy provides a significant reduction in settling time as compared to proportional-derivative control alone.