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James S. Sims

Lam Research

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Publication

Featured researches published by James S. Sims.

Archive | 2008

METHOD FOR IMPROVING PROCESS CONTROL AND FILM CONFORMALITY OF PECVD FILM

Dennis M. Hausmann; James S. Sims; Andrew Antonelli; Sesha Varadarajan; Bart van Schravendijk

Archive | 2013

Plasma enhanced atomic layer deposition with pulsed plasma exposure

James S. Sims; Jon Henri; Kathryn M. Kelchner; Sathish Janjam; Shane Tang

Archive | 2008

High compressive stress carbon liners for MOS devices

Qingguo Wu; James S. Sims; Mandyam Sriram; Seshasayee Varadarajan; Haiying Fu; Pramod Subramonium; Jon Henri; Sirish Reddy

Archive | 2012

Cascaded cure approach to fabricate highly tensile silicon nitride films

Bhadri N. Varadarajan; Gengwei Jiang; Sirish Reddy; James S. Sims

Archive | 2014

METHOD OF DEPOSITING AMMONIA FREE AND CHLORINE FREE CONFORMAL SILICON NITRIDE FILM

Jon Henri; Dennis M. Hausmann; Shane Tang; James S. Sims

Archive | 2014

Methods and apparatuses for uniform reduction of the in-feature wet etch rate of a silicon nitride film formed by ALD

James S. Sims; Kathryn M. Kelchner; Jon Henri; Dennis M. Hausmann

Archive | 2010

Precursor vapor generation and delivery system with filters and filter monitoring system

Damien Slevin; Brad Laird; Curtis Bailey; Ming Li; Sirish Reddy; James S. Sims; Mohamed Sabri; Saangrut Sangplug

Archive | 2008

Method for making high stress boron-doped carbon films

Qingguo Wu; James S. Sims; Mandyam Sriram; Seshasayee Varadarajan; Akhil Singhal

Archive | 2017

Method for depositing metals free ald silicon nitride films using halide-based precursors

James S. Sims; Jon Henri; Ramesh Chandrasekharan; Andrew John Mckerrow; Seshasayee Varadarajan; Kathryn M. Kelchner

Archive | 2013

METHOD FOR SUPPLYING VAPORIZED PRECURSOR

Damien Slevin; Brad Laird; Curtis Bailey; Ming Li; Sirish Reddy; James S. Sims; Mohamed Sabri; Saangrut Sangplug

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Jon Henri

Lam Research

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Kathryn M. Kelchner

Lam Research

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Sirish Reddy

Lam Research

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Seshasayee Varadarajan

Lam Research

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Brad Laird

Lam Research

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Curtis Bailey

Lam Research

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Damien Slevin

Lam Research

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Dennis M. Hausmann

Lam Research

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Ming Li

Lam Research

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Mohamed Sabri

Lam Research

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