Jan Liesener
Zygo Corporation
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Publication
Featured researches published by Jan Liesener.
Optics Express | 2008
Peter de Groot; Xavier Colonna de Lega; Jan Liesener; Michael Darwin
Rigorous coupled wave analysis (RCWA) interprets 3D white-light interference microscopy profiles and reveals the dimensions of optically-unresolved surface features. Measurements of silicon etch depth of a 450-nm pitch grating structure correlate to atomic force microscopy with R(2)= 0.995 and a repeatability of 0.11nm. This same technique achieves a <1nm sensitivity to 80-nm lateral widths of 190-nm pitch gratings using a 570-nm mean wavelength.
Archive | 2009
Peter de Groot; Mark Davidson; Jan Liesener; Xavier Colonna de Lega; Leslie L. Deck
Archive | 2009
Leslie L. Deck; Peter de Groot; Mark Davidson; Jan Liesener; Xavier Colonna de Lega
Archive | 2009
Mark Davidson; Jan Liesener; Peter de Groot; Xavier Colonna de Lega; Leslie L. Deck
Archive | 2009
Peter de Groot; Jan Liesener; Xavier Colonna de Lega
Archive | 2009
Jan Liesener; Mark Davidson; Peter de Groot; Xavier Colonna de Lega; Leslie L. Deck
Archive | 2013
Jan Liesener; Mark Davidson; Peter de Groot; Xavier Colonna de Lega; Leslie L. Deck
Archive | 2012
Peter de Groot; Jan Liesener
Archive | 2009
Jan Liesener; Xavier Colonna de Lega; Peter de Groot
Archive | 2012
Martin F. Fay; Jan Liesener; Xavier Colonna de Lega