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Dive into the research topics where Jan Rothe is active.

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Featured researches published by Jan Rothe.


international symposium on semiconductor manufacturing | 2007

The effects of small lot manufacturing on AMHS operation and equipment front-end design

Olaf Zimmerhackl; Jan Rothe; Kilian Schmidt; Les Marshall; Alfred Honold

This paper analyzes the effects of small lot manufacturing (SLM) on equipment operation and fab performance. It also discusses equipment front-end design challenges and describes options for carrier handling and AMHS operation to maximize the productivity benefits of small lot manufacturing. This paper focuses primarily on the material handling aspects of SLM and as such, does not discuss the influences of equipment Setup or First Wafer Delay which have been covered in other related publications.


international symposium on semiconductor manufacturing | 2007

Optimized performance of automated material delivery by improved exception handling

Jan Rothe; Ralf Georgi; Alfred Honold; Eberhard Teichmann

This paper presents the results of joint efforts by AMD, Qimonda, InReCon and Peer Group to identify overhead transport (OHT) performance limitations in 300 mm fabs as well as propose how to overcome some of these limitations by standardizing the handling of common exceptions.


Archive | 2008

Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier

Jan Rothe; Konrad Rosenbaum


Archive | 2009

Verfahren und System zum lokalen Aufbewahren von Substratbehältern in einem Deckentransportsystem zum Verbessern der Aufnahme/Abgabe-Kapazitäten von Prozessanlagen

Olaf Zimmerhackl; Alfred Honold; Jan Rothe


Archive | 2007

Verfahren und System zum Analysieren von standardmäßigen Anlagennachrichten in einer Fertigungsumgebung

Jan Rothe; Conrad Rosenbaum


Archive | 2006

METHOD AND SYSTEM FOR ANALYZING STANDARD TOOL MESSAGES IN A MANUFACTURING ENVIRONMENT

Konrad Rosenbaum; Jan Rothe


Archive | 2008

Verfahren und System zum Entfernen leerer Trägerbehälter von Prozessanlagen durch Steuern einer Zuordnung zwischen Steuerungsaufgaben und Trägerbehälter

Jan Rothe; Konrad Rosenbaum


eMDC | 2007

The Effects of Small Lot Manufacturing on AMHS Operation and Equipment Front-End Design ISSM Paper: FD-O-238

Olaf Zimmerhackl; Jan Rothe; Kilian Schmidt; Les Marshall; Alfred Honold


Archive | 2007

Verfahren und System zum lokalen Aufbewahren von Substratbehältern in einem Deckentransportsystem zum Verbessern der Aufnahme/Abgabe-Kapazitäten von Prozessanlagen Method and system for local storage of containers in a ceiling substrate transport system for improving the input / output capabilities of process plants

Alfred Honold; Jan Rothe; Olaf Zimmerhackl


Archive | 2007

Method and system by controlling a relationship between control functions and carrier tank empty carrier container of processing equipment for removing

Konrad Rosenbaum; Jan Rothe

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