Jared M. Schwartz

Decomposable and Template Polymers: Fundamentals and Applications

Polymers can be used as temporary place holders in the fabrication of embedded air gaps in a variety of electronic devices. Embedded air cavities can provide the lowest dielectric constant and loss for electrical insulation, mechanical compliance in devices where low-force deformations are desirable, and can temporarily protect movable parts during processing. Several families of polymers have been used as sacrificial, templating polymers including polycarbonates, polynorbornenes (PNBs), and polyaldehydes. The families can be distinguished by chemical structure and decomposition temperature. The decomposition temperature ranges from over 400 C to below room temperature in the case of low ceiling temperature polymers. Overcoat materials include silicon dioxide, polyimides, epoxy, and bis-benzocyclobutene (BCB). The methods of air-gap fabrication are discussed. Finally, the use of photoactive compounds in the patterning of the sacrificial polymers is reviewed. [DOI: 10.1115/1.4033000]

Phototriggerable Transient Electronics: Materials and Concepts

Transient electronics is an emerging field oftechnology where the controlled, programmable vaporizationof a device is needed because retrieval is not possible or adifferent form of disposal is desired. Decomposable polymersare of interest and may be used to form electronic componentsand packages. The ability to trigger these polymers todepolymerize and vaporize at ambient conditions can lead tomany applications. Low ceiling temperature polyaldehydeshave been evaluated for transience. Incorporation of morevolatile monomer units significantly increase the evaporationrate of decomposition products. The stimulus fordisappearance is a photochemical reaction that has beenextended from the ultraviolet to the visible region. Chemicalamplification of the trigger source has been demonstrated withacid amplifiers.