Jaroslaw Kita

Metal-Organic Frameworks for Sensing Applications in the Gas Phase

Several metal-organic framework (MOF) materials were under investigated to test their applicability as sensor materials for impedimetric gas sensors. The materials were tested in a temperature range of 120 °C - 240 °C with varying concentrations of O2, CO2, C3H8, NO, H2, ethanol and methanol in the gas atmosphere and under different test gas humidity conditions. Different sensor configurations were studied in a frequency range of 1 Hz -1 MHz and time-continuous measurements were performed at 1 Hz. The materials did not show any impedance response to O2, CO2, C3H8, NO, or H2 in the gas atmospheres, although for some materials a significant impedance decrease was induced by a change of the ethanol or methanol concentration in the gas phase. Moreover, pronounced promising and reversible changes in the electric properties of a special MOF material were monitored under varying humidity, with a linear response curve at 120 °C. Further investigations were carried out with differently doped MOF materials of this class, to evaluate the influence of special dopants on the sensor effect.

New design of an SnO2 gas sensor on low temperature cofiring ceramics

Abstract A new design for thick film gas sensors was investigated. The sensors were made by the low temperature cofiring ceramics (LTCC) technique with a platinum heater buried inside the multilayer structure. SnO2 or SnO2 with Pd as catalyst thick films were used as gas sensitive materials. The properties of the gas sensors were measured with methane and carbon monoxide. The results of our study show that LTCC can be successfully applied in sensor technology as well as confirming the correctness of the sensor design.

Properties of laser cut LTCC heaters

This article describes fabrication and properties of buried microheaters made inside low temperature co-fired ceramics (LTCC) structures. Laser cutting is used for meander pattern generation in dried Pt, PtAu or PdAg conductive pads. The electrical characterisation of microheaters is based on measurement and analysis of R(T) dependence in the range from 20∞C to 850∞C, measurement and analysis of thermal dynamic properties, long-term high-temperature passive or active ageing and behaviour of the heater in a pulse operation mode. The presented results are very promising for application of LTCC microheaters in various microsystem devices. ” 2000 Elsevier Science Ltd. All rights reserved.

Laser treatment of LTCC for 3D structures and elements fabrication

This paper presents possibility of laser application for fabrication of 3D elements and structures. The Aurel NAVS‐30 Laser Trimming and Cutting System with special software was used. It was applied successfully for fabrication of vias (minimum diameter – 50 μm) in fired and unfired LTCC ceramics and channels with width between 100 μm and 5 mm. The achievements and problems are presented and discussed. The influence of lamination process on quality of vias and channels as well as the problems connected with interaction of laser beam with ceramic tapes are shown. Three‐dimensional resistors and microfluidic system were successfully designed and fabricated based on our investigations. Chosen electrical and thermal parameters of constructed devices are shown, too.

Characterization of PZT thick films fired on LTCC substrates

Ferroelectric ceramic materials based on solid solutions of Pb(Zr,Ti)O3 (PZT) are used in the electronics industry for sensors and actuators and for electromechanical transducers, to name just a few examples. Thick-film technology, i.e., the deposition of thick-film pastes by screen printing, primarily on alumina substrates, is a relatively simple and convenient method to produce layers with a thickness up to 100 μm. The characteristics of thick-film ferroelectrics are similar to those of bulk materials [1–4]. Low-temperature co-fired ceramics (LTCC) materials, which are sintered at the low temperatures typically used for thick-film processing, i.e., around 850 ◦C, are based either on crystallizable glass [5, 6] or a mixture of glass and ceramics, for example, alumina, silica or cordierite (Mg2Al4Si5O18) [7, 8]. Jones et al. have presented a comparison of the mechanical and chemical characteristics of both green and fired LTCC tapes from different suppliers in [9]. Ceramic multi-chip modules (MCM-C) are multilayer substrates with buried conductor lines. An additional contribution to the smaller size and the higher density of MCM-C is the ability to integrate screenprinted resistors, or sometimes capacitors and inductors. These screen-printed components can be placed either beneath the discrete components on the surface of the multilayer dielectric or buried within the multilayer structure. For an overview of passive integrated components in MCM see, for example [10]. For some applications, for example integrated sensors or micro-actuators, PZT thick-films on LTCC that are sintered at relatively low temperatures (around 850 ◦C) comparable with LTCC’s firing temperatures, would be of interest [11, 12]. The aim of this work was to study the compatibility between LTCC and screenprinted PZT as well as the electrical characteristics of the PZT layer. PZT 53/47 powder (PbZr0.53Ti0.47O3) with an excess 6 mol% of PbO was prepared by mixed-oxide synthesis at 900 ◦C for 1 h from high-purity PbO (litharge) 99.9% (Fluka), ZrO2 99% (Tosoh), and TiO2 99% (Fluka). To this was added 2 wt% of lead germanate, with the composition Pb5Ge3O11 (melting point 738 ◦C) as a sintering aid. Lead germanate (PGO) was also prepared by mixed-oxide synthesis from PbO and GeO2 99% (Ventron) at 700 ◦C. After synthesis, both compositions were ball milled in acetone for 1 h and dried. A thick-film paste was prepared from the PZT (2% PGO) and an organic vehicle (ethyl cellulose, alpha-terpineol and butil carbitol acetate) by mixing on a three roll mill. The green LTCC 951 tape (Du Pont) and alumina ceramics were used for substrates. The thick-film structure was prepared by first printing gold film (Remex 3243) and then the PZT film. The PZT film was printed 6 times with intermediate drying. The gold and PZT layers were cofired at 850 ◦C for 8 h in a closed alumina crucible. The thickness of the PZT films after the thermal treatment was around 50 μm. The green and fired Du Pont LTCC 951 tapes were analyzed by X-ray diffraction (XRD) analysis with a Philips PW 1710 X-ray diffractometer using Cu Kα radiation. X-ray spectra were measured from 2 = 20 ◦ to 2 = 70 ◦ in steps of 0.04 ◦. X-ray spectra are shown in Fig. 1. The unfired material is a mixture of alumina and glass. After firing at 850 ◦C peaks of anorthite ((Na,Ca)(Al,Si)4O8) phase appear. The peaks of alumina and anorthite are denoted by “A” and asterisk, respectively. For the electrical measurements gold electrodes were sputtered onto the PZT films. The values of the remanent polarization and the coercive field were determined from ferroelectric hysteresis curves measured with an Aixact TF Analyzer 2000 at 50 Hz. The real and imaginary parts of the complex dielectric constant were measured with an HP 4284 A Precision LCR Meter at 1 kHz. In Table I the electrical parameters, i.e., remanent polarization Pr, coercive field Ec, dielectric constant e′ and dielectric loss tan δ, of the co-fired LTCC/Au/PZT structure are presented. The electrical characteristics of this structure are compared to the characteristics of a similar structure printed on alumina substrates [13]. Hysteresis loops of the PZT films on the alumina and LTCC substrates are shown in Fig. 2.

Embedded passive components for MCM

MCMs often have a large number of passive components connected to a small number of active devices. Integration of passive components into the MCM substrate improves electrical properties and reliability, and also reduces the cost, size and weight of electronic systems. The embedded components are mostly used in MCM-D (thin film) and MCM-C (thick film) modules. The use of embedded elements for MCM-L is at the early stage of development. The basic information on embedded passives as well as the activity of Dresden University of Technology and Wroclaw University of Technology in the area of LTCC buried passives is presented.

CO2 Selective Potentiometric Sensor in Thick-film Technology.

A potentiometric sensor device based on screen-printed Nasicon films was investigated. In order to transfer the promising sensor concept of an open sodium titanate reference to thick film technology, “sodium-rich” and “sodium-poor” formulations were compared. While the “sodium-rich” composition was found to react with the ion conducting Nasicon during thermal treatment, the “sodium-poor” reference mixture was identified as an appropriate reference composition. Screen-printed sensor devices were prepared and tested with respect to CO2 response, reproducibility, and cross-interference of oxygen. Excellent agreement with the theory was observed. With the integration of a screen-printed heater, sensor elements were operated actively heated in a cold gas stream.

LTCC package for MEMS device

LTCC package of silicon membrane katharometer was made and investigated. The package protects the katharometer against mechanical damage and makes possible an easy connection of electrical signals. Moreover, the heater and temperature sensors allow for obtaining the proper temperature of the element. The basic electrical parameters of the integrated heater and thermistors as well as measured temperature distribution are presented.

Geometrical, electrical and stability properties of thick‐film and LTCC microcapacitors

Purpose – Capacitors are frequently used in electronic circuits. Thick‐film technology allows fabrication of such components in the case of small‐ and medium‐capacitance values. They can also be manufactured in LTCC structures. The paper seeks to investigate the electrical properties of thick‐film and LTCC capacitors for as‐fired and long‐term thermally aged test structures in a wide frequency and temperature range.Design/methodology/approach – Sandwich and interdigitated planar capacitors were fabricated on alumina or LTCC substrates using standard screen printing and laser shaping. Various dielectric inks and electrodes materials were used. The crystalline phases in thick‐film dielectric films were identified.Findings – Planar and sandwich LTCC and thick‐film capacitors were designed and fabricated. Different technology variations were tested. X‐ray analysis indicated that both used commercial compositions, compatible with LTCC substrates are based on barium and titatium compounds. The difference in the...

Electrical and stability properties and ultrasonic microscope characterisation of low temperature co-fired ceramics resistors

Abstract This paper presents systematic investigations of electrical and stability properties of various low temperature co-fired ceramics (LTCC) resistors. One of the goals of this work was to check the compatibility of LTCC materials (tapes, resistive and conductive inks) from various manufacturers. Three commercially available green tapes and three LTCC resistor/conductor systems were examined. The resistive inks with 1 k Ω/ sq . nominal sheet resistance were used. Buried (inside) and surface resistors were laminated and fired according to the tape manufacturers’ recommendations. The influence of dimensional effect on sheet resistance and hot temperature coefficient of resistance, the temperature dependence of resistance in a wide temperature range (from −180°C to +130°C), long-term stability of thermally aged as-fired resistors (150°C, 500 h) and durability to high-voltage micro- or nanosecond pulses (50 ns pulses with 4000 V/mm maximum electric field or 10 μs ones with 700–1000 V/mm electrical field) were carried out for electrical and stability characterisation of LTCC resistors. Non-destructive scanning acoustic microscope diagnostics was applied for structure investigation and estimation of lamination and cofiring process quality of buried LTCC resistors.