Jean-Francois Seurin

High-power high-efficiency 2D VCSEL arrays

We review recent results on high-power, high-efficiency two-dimensional vertical-cavity surface-emitting laser (VCSEL) arrays emitting around 980nm. Selectively oxidized, bottom-emitting single VCSEL emitters with 51% power conversion efficiency were developed as the basic building block of these arrays. More than 230W of continuous-wave (CW) power is demonstrated from a ~5mm x 5mm array chip. In quasi-CW mode, smaller array chips exhibit 100W output power, corresponding to more than 3.5kW/cm2 of power density. High-brightness arrays have also been developed for pumping fiber lasers, delivering a fiber output power of 40W. We show that many of the advantages of low-power single VCSEL devices such as reliability, wavelength stability, low-divergence circular beam, and low-cost manufacturing are preserved for these high-power arrays. VCSELs thus offer an attractive alternative to the dominant edge-emitter technology for many applications requiring compact high-power laser sources.

Efficient vertical-cavity surface-emitting lasers for infrared illumination applications

Infrared illumination is used in the commercial and defense markets for surveillance and security, for high-speed imaging, and for military covert operations. Vertical-cavity surface-emitting lasers (VCSELs) are an attractive candidate for IR illumination applications as they offer advantageous properties such as efficiency, intrinsically low diverging circular beam, low-cost manufacturing, narrow emission spectrum, and high reliability. VCSELs can also operate at high temperatures, thereby meeting the harsh environmental requirements of many illuminators. The efficiency and brightness of these VCSELs also reduce the requirements of the power supply compared to, for example, an LED approach. We present results on VCSEL arrays for illumination applications, as well as results on VCSEL-based illumination experiments. These VCSELs are used in illuminators emitting from a few Watts up to several hundred Watts. The emission of these VCSEL-based illuminators is speckle-free with no interference patterns. Infra-red illumination at up to 1,600ft (500m) from the source has been demonstrated using VCSEL-based illumination, without any optics.

High-power vertical-cavity surface-emitting lasers for solid-state laser pumping

Vertical-cavity surface-emitting lasers (VCSELs) have emerged as a promising candidate for pumping of solid-state lasers, as they can be configured into high-power two-dimensional arrays and modules of arrays. VCSELs emit in a circular, uniform beam which can greatly reduce the complexity and cost of coupling optics. Their narrow and stable emission spectrum is well suited to the narrow absorption spectrum generally observed for solid-state gain media. The superior reliability of VCSELs greatly enhances the robustness of solid-state laser systems and enables high-temperature operation. In this work, we discuss recent developments on kW-class VCSEL pumps for solid-state lasers. Results on VCSEL modules designed for end-pumping and for side-pumping are presented. More than 4kW in CW operation is demonstrated from a multi-array VCSEL module. We also present results on solid-state lasers using VCSEL modules as pumps. In an end-pumping configuration, more than 250W peak power at 1064nm is demonstrated, and in a sidepumping Q-switched configuration, more than 21mJ at 946nm is demonstrated for an Nd:YAG solid-state laser.

High-power vertical-cavity surface-emitting arrays

We present record output power levels (a few hundred Watts) in continuous-wave (CW) and quasi-CW (QCW) from 2D vertical-cavity surface-emitting laser (VCSEL) arrays, corresponding to power densities exceeding 1kW/cm2 in CW and 3.5kW/cm2 in QCW. These VCSEL arrays emit around 975nm with narrow spectral width (<1nm) and excellent wavelength stability (<0.07nm/K). Peak power conversion efficiency of properly designed arrays exceeds 50%. Additional features of these arrays include emission in a circular, low-diverging beam, and reliable high-temperature operation. These arrays can also be operated reliably in short pulses (<200nsec) at many times their roll-over CW current, making them useful for high-energy applications. VCSEL arrays with 2.2kW peak output power operating under 100nsec pulse-width have been demonstrated.

High power 808 nm VCSEL arrays for pumping of compact pulsed high energy Nd:YAG lasers operating at 946 nm and 1064 nm for blue and UV light generation

High power 808 nm VCSEL arrays were developed to pump compact pulsed Nd:YAG lasers. A QCW side-pumped passively Q-switched Nd:YAG laser operating at 1064 nm produced linearly polarized 4 ns IR pulses with 4.7 mJ pulse energy. These pulses were externally frequency doubled and quadrupled resulting in 2.5 mJ pulse energy at 532 nm and 0.8 mJ at 266 nm respectively. A similar but actively Q-switched dual side-pumped Nd:YAG laser operating at the weaker quasi three-level 946 nm transition produced 12 mJ pulses that were efficiently frequency doubled resulting in 5.6 mJ blue pulses of 17 ns duration.

High-brightness pump sources using 2D VCSEL arrays

Many applications require laser pump sources with high output power (tens to hundreds of Watts) in the smallest spot, with the smallest divergence. Such high-brightness pump sources typically use edge-emitting semiconductor lasers. However, it is also possible to use high-power two-dimensional vertical-cavity surfaceemitting laser (VCSEL) arrays for this purpose. Using a single 976nm 2D VCSEL array chip in an external cavity configuration, combined with a matching micro-lens array, we have demonstrated more than 30W output power from a 50μm/0.22NA fiber, corresponding to a brightness of 10MW/cm2.sr. This represents a substantial reduction in module complexity compared to edge-emitter based modules with similar brightness. These novel high-brightness pump sources exhibit some well-known intrinsic VCSEL performance features such as wavelength stability and narrow spectrum. Power and brightness can be scaled up using polarization and spectral combining.

Progress on vertical-cavity surface-emitting laser arrays for infrared illumination applications

For infrared illumination with wavelength range of 808nm-1064nm, vertical-cavity surface-emitting lasers (VCSELs) offer many advantageous properties including superior beam quality (such as low divergence, circular shape beam and speckle-free image), increased eye safety, high reliability and low manufacturing cost. We report our progress on highpower high-efficiency VCSELs and two dimensional (2D) VCSEL arrays for such illumination applications. GaAs-based VCSEL wafers are grown by MOCVD and processed into either top-emitting or bottom-emitting devices depending on the emission wavelength and applications. Results from both single devices and arrays are presented. In particular, record-high power conversion efficiency (PCE) of 63.4% with 300mW output was achieved from VCSELs at 1064nm. Such VCSELs also operate with <55% PCE at 50C. For a 2mm by 10mm array, 56.4% PCE with 150W output was demonstrated. Using those VCSELs and arrays as building blocks, various high power illuminators ranging from a few Watts to over 100 kiloWatts have been fabricated.

Progress on high-power, high-brightness VCSELs and applications

Vertical-cavity surface-emitting lasers (VCSELs) are attractive for many pumping and direct-diode applications due to combined advantages in low cost, high reliability, narrow and thermally stable spectrum, high power scalability, and easy system integration, etc. We report our progress on electrically pumped, GaAs-based, high- power high-brightness VCSELs and 2D arrays in the infrared wavelength range. At 976nm, over 5.5W peak CW output and 60% peak power conversion efficiency (PCE) were demonstrated with 225um oxide-confined device. For 5x5mm arrays, peak PCE of 54% and peak power of >450W at 976nm, peak PCE of 46% and peak power of >110W at 808nm were achieved respectively under QCW conditions. External cavity configuration was used to improve the VCSEL brightness. Single mode output of 280mW and 37% PCE were realized from 80um device. For large 325um device, we obtained single mode (M2=1.1) CW output of 2.1W, corresponding to a brightness of 160MW/cm2*sr. Three major areas of applications using such VCSELs are discussed: 1. High brightness fiber output; 2. High power, high efficiency green lasers from 2nd harmonic generation. 3.34W green output with 21.2% PCE were achieved; 3. Pumping solid state lasers for high energy pulse generation. We have demonstrated Q-switched pulses with 16.1mJ at 1064nm and 4.9mJ with 1W average power at 473nm.

Two-dimensional pseudo-random optical phased array based on tandem optical injection locking of vertical cavity surface emitting lasers.

We demonstrate, both theoretically and experimentally, a pseudo-random, two-dimensional optical phased array (OPA) concept based on tandem injection locking of 64-element vertical cavity surface emitting laser (VCSEL) arrays. A low cavity-Q VCSEL design resulted in an injection locking optical power of less than 1 μW per VCSEL, providing large OPA scaling potential. Tandem injection locking of two VCSEL arrays resulted in measured controllable optical phase change of 0-1.6π. A high quality beam formed with suppressed grating lobes due to the pseudo-random array design was demonstrated with performance close to simulated results. A preliminary 2.2° x 1.2° beam steering example using the tandem arrays was also demonstrated.

High power VCSEL array pumped Q-switched Nd:YAG lasers

Solid-state lasers pumped by high-power two-dimensional arrays of vertical-cavity surface-emitting lasers (VCSELs) were investigated. Both end-pumping and side-pumping schemes of Nd:YAG lasers with high power kW-class 808 nm VCSEL pump modules were implemented. For one application 10 mJ blue laser pulses were obtained from a frequencydoubled actively Q-switched VCSEL-array dual side-pumped Nd:YAG laser operating at 946 nm. For another application 10 mJ green laser pulses were obtained from a frequency-doubled passively Q-switched VCSEL-array endpumped Nd:YAG laser operating at 1064 nm. Both QCW and CW pumping schemes were investigated to achieve high average Q-switched power.