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Jean-Paul Booth

Lam Research

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Publication

Featured researches published by Jean-Paul Booth.

Archive | 2009

Capacitively-coupled electrostatic (cce) probe arrangement for detecting strike step in a plasma processing chamber and methods thereof

Jean-Paul Booth; Douglas Keil

Archive | 2009

Passive capacitively-coupled electrostatic (cce) probe arrangement for detecting plasma instabilities in a plasma processing chamber

Jean-Paul Booth; Mikio Nagai; Douglas Keil

Archive | 2009

Rf-biased capacitively-coupled electrostatic (rfb-cce) probe arrangement for characterizing a film in a plasma processing chamber

Jean-Paul Booth; Luc Albarede; Jung Kim; Douglas Keil

Archive | 2009

Passive capacitively-coupled electrostatic (cce) probe arrangement for detecting in-situ arcing events in a plasma processing chamber

Jean-Paul Booth; Douglas Keil

Archive | 2009

Methods for automatically characterizing a plasma

Douglas Keil; Jean-Paul Booth; Christopher Thorgrimsson

Archive | 2009

Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber

Jean-Paul Booth; Douglas Keil

Archive | 2008

Plasma unconfinement sensor and methods thereof

Jean-Paul Booth; Alexei Marakhtanov; Rajinder Dhindsa; Luc Albarede; Seyed Jafar Jafarian-Tehrani

Archive | 2009

Methods and apparatus for normalizing optical emission spectra

Vijayakumar C. Venugopal; Eric A. Pape; Jean-Paul Booth

Archive | 2012

Processing system for detecting in-situ arcing events during substrate processing

Jean-Paul Booth; Douglas Keil

Archive | 2014

Systems for automatically characterizing a plasma

Douglas Keil; Jean-Paul Booth; Christopher Thorgrimsson

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Collaboration

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Douglas Keil

Lam Research

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Christopher Thorgrimsson

Lam Research

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Luc Albarede

Lam Research

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Mikio Nagai

Lam Research

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Alexei Marakhtanov

Lam Research

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Eric A. Pape

Lam Research

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Jung Kim

Lam Research

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Rajinder Dhindsa

Lam Research

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Seyed Jafar Jafarian-Tehrani

Lam Research

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Vijayakumar C. Venugopal

Lam Research

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