Jeff Chiles

Heterogeneous lithium niobate photonics on silicon substrates

A platform for the realization of tightly-confined lithium niobate photonic devices and circuits on silicon substrates is reported based on wafer bonding and selective oxidation of refractory metals. The heterogeneous photonic platform is employed to demonstrate high-performance lithium niobate microring optical resonators and Mach-Zehnder optical modulators. A quality factor of ~7.2 × 10⁴ is measured in the microresonators, and a half-wave voltage-length product of 4 V.cm and an extinction ratio of 20 dB is measured in the modulators.

Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics

Silicon-on-nitride ridge waveguides are demonstrated and characterized at mid- and near-infrared optical wavelengths. Silicon-on-nitride thin films were achieved by bonding a silicon handling die to a silicon-on-insulator die coated with a low-stress silicon nitride layer. Subsequent removal of the silicon-on-insulator substrate results in a thin film of silicon on a nitride bottom cladding, readily available for waveguide fabrication. At the mid-infrared wavelength of 3.39 μm, the fabricated waveguides have a propagation loss of 5.2 ± 0.6 dB/cm and 5.1 ± 0.6 dB/cm for the transverse-electric and transverse-magnetic modes, respectively.

Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

Thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge(23)Sb(7)S(70), to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 10(5) quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.

High-contrast, all-silicon waveguiding platform for ultra-broadband mid-infrared photonics

Suspended silicon-membrane ridge waveguides are fabricated and characterized on a single-material photonic device platform. By using direct bonding, a thin layer of silicon is fused to a bulk silicon substrate, which is patterned with narrow trenches. Waveguides are etched on the resulting suspended membranes and are characterized at mid- and near-infrared wavelengths. Transverse magnetic-mode propagation losses of 2.8 ± 0.5 and 5.6 ± 0.3 dB/cm at 3.39 and 1.53 μm wavelengths are measured, respectively. This all-silicon optical platform is capable of continuous low-loss waveguiding from wavelengths of 1.2–8.5 μm, enabling numerous applications in frequency conversion and spectral analysis.

Submicron optical waveguides and microring resonators fabricated by selective oxidation of tantalum

Submicron tantalum pentoxide ridge and channel optical waveguides and microring resonators are demonstrated on silicon substrates by selective oxidation of the refractory metal, tantalum. The novel method eliminates the surface roughness problem normally introduced during dry etching of waveguide sidewalls and also simplifies fabrication of directional couplers. It is shown that the measured propagation loss is independent of the waveguide structure and thereby limited by the material loss of tantalum pentoxide in waveguides core regions. The achieved microring resonators have cross-sectional dimensions of ~600 nm × ~500 nm, diameters as small as 80 µm with a quality, Q, factor of 4.5 × 10(4), and a finesse of 120.

Tight control of light beams in photonic crystals with spatially-variant lattice orientation

Spatially-variant photonic crystals (SVPCs), in which the orientation of the unit cell changes as a function of position, are shown to be capable of abruptly controlling light beams using just low index materials and can be made to have high polarization selectivity. Multi-photon direct laser writing in the photo-polymer SU-8 was used to fabricate three-dimensional SVPCs that direct the flow of light around a 90 degree bend. The lattice spacing and fill factor were maintained nearly constant throughout the structure. The SVPCs were characterized at a wavelength of 2.94 μm by scanning the faces with optical fibers and the results were compared to electromagnetic simulations. The lattices were shown to direct infrared light of one polarization through sharp bends while the other polarization propagated straight through the SVPC. This work introduces a new scheme for controlling light that should be useful for integrated photonics.

Low-loss, submicron chalcogenide integrated photonics with chlorine plasma etching

A chlorine plasma etching-based method for the fabrication of high-performance chalcogenide-based integrated photonics on silicon substrates is presented. By optimizing the etching conditions, chlorine plasma is employed to produce extremely low-roughness etched sidewalls on waveguides with minimal penalty to propagation loss. Using this fabrication method, microring resonators with record-high intrinsic Q-factors as high as 450 000 and a corresponding propagation loss as low as 0.42 dB/cm are demonstrated in submicron chalcogenide waveguides. Furthermore, the developed chlorine plasma etching process is utilized to demonstrate fiber-to-waveguide grating couplers in chalcogenide photonics with high power coupling efficiency of 37% for transverse-electric polarized modes.

Low-loss and high index-contrast tantalum pentoxide microring resonators and grating couplers on silicon substrates

A platform for high index-contrast integrated photonics based on tantalum pentoxide submicrometer waveguides on silicon substrates is introduced. The platform allows demonstration of microring resonators with loaded quality factor, Q, of 67,000 and waveguides with a propagation loss of 4.9 dB/cm. Grating couplers, with an insertion loss of ~6 dB per coupler and 3 dB bandwidth of ~50 nm, are also demonstrated and integrated with microring resonators.

Second-harmonic generation in single-mode integrated waveguides based on mode-shape modulation

Second-harmonic generation is demonstrated using grating-assisted quasi-phase matching, based on waveguide-width modulation or mode-shape modulation. Applicable to any thin-film integrated second-order nonlinear waveguide, the technique is demonstrated in compact lithium niobate ridge waveguides. Fabricated devices are characterized with pulsed-pumping in the near-infrared, showing second-harmonic generation at a signal wavelength of 784 nm and propagation loss of 1 dB/cm.

Multi-planar amorphous silicon photonics with compact interplanar couplers, cross talk mitigation, and low crossing loss

We propose and experimentally demonstrate a photonic routing architecture that can efficiently utilize the space of multi-plane (3D) photonic integration. A wafer with three planes of amorphous silicon waveguides was fabricated and characterized, demonstrating < 3 × 1 0 − 4 dB loss per out-of-plane waveguide crossing, 0.05 ± 0.02 dB per interplane coupler, and microring resonators on three planes with a quality factors up to 8.2 × 1 0 4 . We also explore a phase velocity mapping strategy to mitigate the cross talk between co-propagating waveguides on different planes. These results expand the utility of 3D photonic integration for applications such as optical interconnects, neuromorphic computing and optical phased arrays.