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Jeffrey A. Barnes

Entegris

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Publication

Featured researches published by Jeffrey A. Barnes.

Archive | 2009

Antioxidants for post-CMP cleaning formulations

David Angst; Peng Zhang; Jeffrey A. Barnes; Prerna Sonthalia; Emanuel I. Cooper; Karl Boggs

Archive | 2014

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

Jeffrey A. Barnes; Emanuel I. Cooper; Li-Min Chen; Steven Lippy; Rekha Rajaram; Sheng-Hung Tu

Archive | 2009

Copper cleaning and protection formulations

Jeffrey A. Barnes; Brian Benac; Karl Boggs; Lin Feng; Jun Liu; Melissa A. Petruska; Xiaodong Yan; Peng Zhang

Archive | 2011

AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES

Jeffrey A. Barnes; Steven Lippy; Peng Zhang; Rekha Rajaram

Archive | 2011

COMPOSITION AND PROCESS FOR SELECTIVELY ETCHING METAL NITRIDES

Tianniu Chen; Nicole E. Thomas; Steven Lippy; Jeffrey A. Barnes; Emanuel I. Cooper; Peng Zhang

Archive | 2014

Non-amine post-CMP composition and method of use

Jeffrey A. Barnes; Jun Liu; Peng Zhang

Archive | 2013

Post-cmp removal using compositions and method of use

Jun Liu; Jeffrey A. Barnes; Emanuel I. Cooper; Laisheng Sun; Elizabeth Thomas; Jason Chang

Archive | 2012

Formulations for the removal of particles generated by cerium- containing solutions

Emanuel I. Cooper; Jeffrey A. Barnes

Archive | 2012

Removal of metal impurities from silicon surfaces for solar cell and semiconductor applications

Li-Min Chen; Emanuel I. Cooper; Jeffrey A. Barnes; Jun Liu; Laisheng Sun; Thomas H. Baum; Michael B. Korzenski; Ben Lochtenberg; Lawrence Dubois

Archive | 2013

FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION

Tianniu Chen; Steven Bilodeau; Emanuel I. Cooper; Li-Min Chen; Jeffrey A. Barnes; Mark Biscotto; Karl E. Boggs; Rekha Rajaram

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Emanuel I. Cooper

IBM

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Jun Liu

United States Department of Energy

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Rekha Rajaram

Entegris

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Li-Min Chen

Entegris

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Steven Bilodeau

Entegris

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Steven Lippy

Entegris

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Karl Boggs

IBM

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Emanuel I. Cooper

IBM

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Laisheng Sun

Entegris

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Sheng-Hung Tu

Entegris

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