Jeremie Maire

Thermal phonon transport in silicon nanowires and two-dimensional phononic crystal nanostructures

Thermal phonon transport in silicon nanowires (Si NWs) and two-dimensional phononic crystal (2D PnC) nanostructures was investigated by measuring thermal conductivity using a micrometer-scale time-domain thermoreflectance. The impact of nanopatterning on thermal conductivity strongly depends on the geometry, specularity parameter, and thermal phonon mean free path (MFP) distribution. Thermal conductivities for 2D PnC nanostructures were found to be much lower than that for NWs with similar characteristic length and surface-to-volume ratio due to stronger phonon back scattering. In single-crystalline Si, PnC patterning has a stronger impact at 4 K than at room temperature due to a higher specularity parameter and a longer thermal phonon MFP. Nanowire patterning has a stronger impact in polycrystalline Si, where thermal phonon MFP distribution is biased longer by grain boundary scattering.

Heat conduction tuning by wave nature of phonons

Perfectly periodic structures modify the transport properties of heat carriers by interference effect and hinder heat transport. The world communicates to our senses of vision, hearing, and touch in the language of waves, because light, sound, and even heat essentially consist of microscopic vibrations of different media. The wave nature of light and sound has been extensively investigated over the past century and is now widely used in modern technology. However, the wave nature of heat has been the subject of mostly theoretical studies because its experimental demonstration, let alone practical use, remains challenging due to its extremely short wavelengths. We show a possibility to use the wave nature of heat for thermal conductivity tuning via spatial short-range order in phononic crystal nanostructures. Our experimental and theoretical results suggest that interference of thermal phonons occurs in strictly periodic nanostructures and slows the propagation of heat. This finding expands the methodology of heat transfer engineering to the wave nature of heat.

Reduced thermal conductivities of Si one-dimensional periodic structure and nanowire

Air-suspended Si nanowires and one-dimensional (1D) phononic crystals (PnC) nanostructures were fabricated and the thermal conductivity for each structure was measured. The nanostructures were fabricated by a top-down approach from a 145-nm-thick silicon-on-insulator wafer. The thermal conductivities of these nanostructures were measured by an all-optical system based on the time domain thermoreflectance method that we adapted to measure the properties of air-bridge structures. The reduction in thermal conductivity was clearly observed as the width of the nanowire is decreased due to more frequent surface scattering. The 1D PnC structure showed an unexpectedly low thermal conductivity, which is much lower than that of a nanowire with the average width of 1D PnC nanostructure.

Heat guiding and focusing using ballistic phonon transport in phononic nanostructures

Unlike classical heat diffusion at macroscale, nanoscale heat conduction can occur without energy dissipation because phonons can ballistically travel in straight lines for hundreds of nanometres. Nevertheless, despite recent experimental evidence of such ballistic phonon transport, control over its directionality, and thus its practical use, remains a challenge, as the directions of individual phonons are chaotic. Here, we show a method to control the directionality of ballistic phonon transport using silicon membranes with arrays of holes. First, we demonstrate that the arrays of holes form fluxes of phonons oriented in the same direction. Next, we use these nanostructures as directional sources of ballistic phonons and couple the emitted phonons into nanowires. Finally, we introduce thermal lens nanostructures, in which the emitted phonons converge at the focal point, thus focusing heat into a spot of a few hundred nanometres. These results motivate the concept of ray-like heat manipulations at the nanoscale.

Ballistic thermal transport in silicon nanowires

We have experimentally investigated the impact of dimensions and temperature on the thermal conductivity of silicon nanowires fabricated using a top-down approach. Both the width and temperature dependences of thermal conductivity agree with those in the existing literature. The length dependence of thermal conductivity exhibits a transition from semi-ballistic thermal phonon transport at 4 K to fully diffusive transport at room temperature. We additionally calculated the phonon dispersion in these structures in the framework of the theory of elasticity and showed that the thermal conductance increases with width. This agrees with our experimental observations and supports the pertinence of using the modified phonon dispersion at low temperatures.

Impact of limiting dimension on thermal conductivity of one-dimensional silicon phononic crystals

We present experimental and theoretical investigations on the roles of the limiting dimensions, such as the smallest dimension, surface roughness, and density of holes in the reduction of thermal conductivity of one-dimensional phononic nanostructures at temperatures of 4 and 295 K. We discover that the thermal conductivity does not strongly depend on the period of the phononic crystal nanostructures whereas the surface roughness and the smallest dimension of the structure—the neck—play the most important roles in thermal conductivity reduction. Surface roughness is a very important structural parameter in nanostructures with a characteristic length less than 100 nm in silicon. The importance of the roughness increases as the neck size decreases, and the thermal conductivity of the structure can differ by a factor of four, reaching the thermal conductivity of a small nanowire. The experimental data are analyzed using the Callaway–Holland model of Boltzmann equation and Monte Carlo simulation providing dee...

Thermal conduction in Si and SiGe phononic crystals explained by phonon mean free path spectrum

Thermal phonon transport in single-crystalline Si, amorphous SiGe, and poly-SiGe nanostructures was investigated experimentally at room temperature. The characteristic length dependence of thermal conductivity was compared across these three materials by changing the shortest distance between the circular holes of phononic crystals formed in the membranes. The dependences clearly differ for these materials, and these differences can be explained by the thermal phonon mean free path spectra of the three materials. Nanostructuring has a larger impact on thermal conductivity reduction when the characteristic length is comparable to that in the region where the thermal phonon mean free path spectrum is dense. The results suggest that thermal phonon mean free path spectra can be estimated qualitatively by thermal conductivity measurements with characteristic length sweeps.

Thermal conductance of silicon interfaces directly bonded by room-temperature surface activation

Using the recently developed method to directly measure thermal boundary conductance (TBC) across bonded interfaces, we report the measurements of TBC at interfaces bonded by surface activated bonding at room temperature. The TBC of as-bonded silicon-silicon interface is limited to 1.3 × 102 MW m−2 K−1, which is equivalent to thermal conductance of micrometer-thick bulk silicon. We further show that the TBC can be greatly improved by recrystallizing the amorphous interlayer, which here is realized by thermal annealing. The dependence of the TBC on the annealing temperature is highly nonlinear, which can be explained in terms of thermal activation of crystal growth.

Thermal conductivity reduction in silicon fishbone nanowires

Semiconductor nanowires are potential building blocks for future thermoelectrics because of their low thermal conductivity. Recent theoretical works suggest that thermal conductivity of nanowires can be further reduced by additional constrictions, pillars or wings. Here, we experimentally study heat conduction in silicon nanowires with periodic wings, called fishbone nanowires. We find that like in pristine nanowires, the nanowire cross-section controls thermal conductivity of fishbone nanowires. However, the periodic wings further reduce the thermal conductivity. Whereas an increase in the wing width only slightly affects the thermal conductivity, an increase in the wing depth clearly reduces thermal conductivity, and this reduction is stronger in the structures with narrower nanowires. Our experimental data is supported by the Callaway-Holland model, finite element modelling and phonon transport simulations.

Thermal phonon transport in Si thin film with dog-leg shaped asymmetric nanostructures

Thermal phonon transport in single-crystalline Si thin films with dog-leg shaped nanostructures was investigated. Thermal conductivities for the forward and backward directions were measured and compared at 5 and 295 K by micro thermoreflectance. The Si thin film with dog-leg shaped nanostructures showed lower thermal conductivities than those of nanowires and two-dimensional phononic crystals with circular holes at the same surface-to-volume ratio. However, asymmetric thermal conductivity was not observed at small temperature gradient condition in spite of the highly asymmetric shape though the size of the pattern is within thermal phonon mean free path range. We conclude that strong temperature dependent thermal conductivity is required to observe the asymmetric thermal phonon conduction in monolithic materials with asymmetric nanostructures.