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Jess Köhler

Carl Zeiss AG

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Publication

Featured researches published by Jess Köhler.

Archive | 2003

Illumination system for microlithography projection exposure system, has mirror arrangement with array of individual mirrors that is controlled individually by changing angular distribution of light incident on mirror arrangement

Markus Brotsack; Jess Köhler; Wolfgang Singer; Johannes Wangler

Archive | 2001

Illuminating system of a microlithographic projection exposure arrangement

Johannes Wangler; Jess Köhler

Archive | 2002

Projection exposure system

Nils Dieckmann; Jess Köhler; Johannes Wangler

Archive | 2001

Microlithographic illuminating system and microlithographic projection exposure arrangement incorporating said system

Johannes Wangler; Jess Köhler

Archive | 2005

Wabenkondensor und Beleuchtungssystem damit

Jess Köhler

Archive | 2001

Light integrator for an irradiation device

Jan Hoegee; Jess Köhler; Marnix Aldert Tas; Der Lei Sijbe Abraham Hartman Van; Der Veen Paul Van; Johannes Wangler

Archive | 2001

Microlithographic illumination system and microlithographic projection system with the same

Jess Köhler; Johannes Wangler

Archive | 2004

Transmissive birefringent optical element manufacture, by applying radiation or tension to cause continuous change in internal strain distribution of optical material

Damian Fiolka; Jess Köhler

Archive | 2001

Illumination system with reduced energy loading

Jess Köhler; Alexander Sohmer

Archive | 2002

Illumination system with reduced energy load

Jess Köhler; Alexander Sohmer

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Collaboration

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Johannes Wangler

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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Alexander Sohmer

Carl Zeiss AG

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Der Lei Sijbe Abraham Hartman Van

Carl Zeiss AG

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Jan Hoegee

Carl Zeiss AG

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Markus Brotsack

Carl Zeiss AG

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Marnix Aldert Tas

Carl Zeiss AG

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Nils Dieckmann

Carl Zeiss AG

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Wolfgang Singer

Carl Zeiss AG

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Der Veen Paul Van

ASML Holding

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