Jiantai Dou

Focal length measurement based on the wavefront difference method by a Fizeau interferometer.

A method for measuring the focal length of the lens by a Fizeau interferometer is proposed. Based on the Gaussian imaging equation and the longitudinal displacements of the object point and image point, a precise formula for focal length calculation is deduced. The longitudinal displacement of the object points is determined by the wavefront difference method with a subnanometer resolution. An experimental system for focal length measurements is set up to verify the principle. The sources of uncertainty in measurement are discussed. Both the positive and negative lens experimental results indicate that the measurement accuracy is less than 0.16% under normal experimental environment.

Real-time complex amplitude reconstruction method for beam quality M^2 factor measurement

We present a real-time complex amplitude reconstruction method for determining the beam propagation ratio M2 of laser beams based on the transport of intensity equation (TIE). In this work, a synchronous acquisition system consisting of two identical CCDs is established. Once two beam intensity images at different cross-section positions along the optical axis are captured simultaneously by the system, the complex amplitude of the laser beam can be rapidly reconstructed using TIE algorithm. Then the beam intensity distribution at any section position along its propagation direction can be obtained by using angular spectrum (AS) theory. The beam quality M2 factor is therefore calculated utilizing the second-order moments and hyperbola fitting methods, which conform to the ISO standard. The suitability of this method is verified by the numerical analysis and experiments with the He-Ne and high-power fiber laser sources, respectively. The experimental technique is simple and fast, which allows to investigate laser beams under conditions inaccessible to other methods.

Generalized shift-rotation absolute measurement method for high-numerical-aperture spherical surfaces with global optimized wavefront reconstruction algorithm

In this paper, a generalized shift-rotation absolute measurement method is proposed to measure the absolute surface shape of high-numerical-aperture spherical surfaces. Based on the wavefront difference method, the high order misalignment aberrations can be removed from the measurements. Our generalized shift-rotation absolute measurement process only needs one rotational measurement position and one translational measurement position. A wavefront reconstruction method based on the self-adaptive differential evolution algorithm is proposed to calculate the Zernike polynomials coefficient ai of the absolute surface shape Wtest(x,y), the rotation angle Δθ, the translation δx along the x axis, and the translation δy along the y axis. The translation error and rotation error in other absolute measurement methods are avoided using our generalized shift-rotation absolute measurement method. Experimental absolute results of the test surface and reference surface are given and the difference of reference surface shapes between two testings in experiments is 0.12 nm root mean square.

10 kW-level spectral beam combination of two high power broad-linewidth fiber lasers by means of edge filters

We demonstrated a scheme to spectrally combine two high power, broad-linewidth single beams using a steep edge filter as the combining element. 10.12 kW combined output power is achieved with a beam quality of M2 x = 11.4 and M2 y = 10.4. To the best of our knowledge, this is the highest output power ever reported for the filter based SBC system. Despite the broad emission spectrum of the single channel, the combining efficiency is measured to be 98.9%, which proves the high efficiency of the filter for both the reflection and transmission cases. A detail analysis of the thermal behavior is carried out to aid in the optimization of the beam quality. This SBC system permits the efficient combining of the beams with broad linewidth and provides another approach to achieve a combined output beam beyond 10 kW level.

EUV multilayer defects reconstruction based on the transport of intensity equation and partial least-square regression

Multilayer defects which reside on the top or inside the multilayer are one of the most critical concerns in the extreme ultraviolet lithography (EUVL) manufacturing process. We proposed the transport of intensity equation and partial least-square regression (TIE & PLSR) method to inspect the defect and reconstruct its geometric parameters: height and full width at half maximum (FWHM). The transport of intensity equation (TIE) is employed to retrieve the phase of the multilayer defect from the two scattering images, which collected at two adjacent propagation distances. Comparing the simulated ideal phase, the phase deformations caused by different top heights and widths of the defects are analyzed. The optical properties maximum, minimum and fitting Zernike coefficients are used to parameterize the phase deformation. Partial least-squares regression (PLSR) is applied to associate the optical properties of the phase deformation with the geometric parameters of the defects, and reconstruct geometric parameters of the measured defect from the established data library. The reconstruction error is less than 0.2% in simulation experiment.