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Jin Kai

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Publication

Featured researches published by Jin Kai.

Archive | 2016

A stepless adjustable device for adjusting epitaxial wafer thermoscope probe position

Liu Xiangping; Yang Cuibai; Fang Cong; Zhang Yang; Zhang Lu; Jin Kai; Wang Lei

Archive | 2016

Inlet structure of rotational circle disk MOCVD reacting chamber

Liu Xiangping; Fang Cong; Jin Kai; Zhang Lu; Wang Lei; Feng Zhaojun

Archive | 2016

Subregion section wafer carrier

Fang Cong; Feng Zhaojun; Wang Lei; Jin Kai; Zhang Lu; Liu Xiangping

Archive | 2016

Heating plate that MOCVD system used

Jin Kai; Fang Cong; Liu Xiangping; Feng Zhaojun; Zhang Lu; Wang Lei

Archive | 2017

Be applied to water smoke of coating cleaning machine and collect cyclic utilization device

Jin Kai; Fang Cong; Liu Xiangping; Feng Zhaojun; Zhang Lu

Archive | 2017

That is applied to wafer rubber coating cleaning equipment removes water smoke device

Liu Xiangping; Fang Cong; Jin Kai; Feng Zhaojun; Zhang Lu

Archive | 2016

Method for preventing reactants and by-products of reactants from being deposited on MOCVD reaction chamber components

Yang Cuibai; Zhang Lu; Zhang Yang; Fang Cong; Liu Xiangping; Jin Kai; Wang Lei

Archive | 2016

Can prevent wafer warping structure among MOCVD reaction sequence

Liu Xiangping; Yang Cuibai; Zhang Yang; Fang Cong; Zhang Lu; Jin Kai; Wang Lei

Archive | 2016

Water spray removing device applied to wafer gluing cleaner

Liu Xiangping; Fang Cong; Jin Kai; Feng Zhaodun; Zhang Lou

Archive | 2016

A clean system for MOCVD reacting chamber

Feng Zhaojun; Fang Cong; Jin Kai; Liu Xiangping; Zhang Lu; Wang Lei

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Collaboration

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