Jindřich Oulehla

Position measurement in standing wave interferometer for metrology of length

We present techniques oriented to improvement of precision in incremental interferometric measurements of displacements over a limited displacement range. The wavelength of the coherent laser source is here directly stabilized to a mechanical reference and not to a reference of any optical frequency. This may represent a reduction of uncertainty linking the laser wavelength not to indirectly evaluated refractive index but to the setup mechanics which cannot be completely eliminated. Here we suggest an approach where the traditional interferometers are replaced by a passive Fabry-Perot cavity with position sensing using an intracavity transparent photodetector.

Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement method

In scanning probe microscopy laser interferometers are usually used for measuring the position of the probe tip with a metrological traceability. As the most of the AFM setups are designed to work under standard atmospheric conditions the changes of the refractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. In order to achieve better accuracies the refractive index of air has to be monitored continuously and its instantaneous value has to be used for compensating the lengths measured by all of the interferometric axes. In the presented work we developed a new concept of an electronic unit which is able to monitor the refractive index of air on basis of measurement of ambient atmospheric conditions: temperature, humidity, pressure of the air and the CO2 concentration. The data processing is based on Ciddor equation for calculating the refractive index of air. The important advantage of the unit is a very low power consumption of the electronics so the unit causes only negligible temperature effects to the measured environment. The accuracy of the indirect measuring method employed by the unit was verified. We tested the accuracy in comparison with a direct method of measuring refractive index of air based on an evacuatable cell placed at the measuring arm of a laser interferometer. An experimental setup used for verification is presented together with a set of measurements describing the performance. The resulting accuracy of the electronic unit falls to the 4.1 exp(-7) relatively.

Evaluation of thermal expansion coefficient of Fabry-Perot cavity using an optical frequency comb

In construction of highly mechanically stable measuring devices like AFM microscopes or nano-comparators the use of low expansion materials is very necessary. We can find Zerodur ceramics or ULE glasses used as a frame or basement of these devices. The expansion coefficient of such low-expansion materials is lower than 0.01 x 10-6 m•K-1. For example in case of a frame or basement 20 cm long it leads to a dilatation approximately 4 nm per 1 K. For calculation of the total uncertainty of the mentioned measuring devices the knowledge of the thermal expansion coefficient of the frame or basement is necessary. In this work we present a method, where small distance changes are transformed into rf-frequency signal. The frequency of this signal is detected by a counter which measures the value of the frequency with respect to an ultra-stable time-base. This method uses a Fabry-Perot cavity as a distance measuring tool. The spacer of the optical resonator is made from the investigated low-expansion material. It is placed into a vacuum chamber where the inside temperature is controlled. A selected mode of the femtosecond frequency of the femtosecond comb which represent the distance changes of the optical resonator. The frequency is measured by the rf-counter which is synchronized by a time-base signal from an atomic clock. The first results show the resolution of the method in the 0.1 nm order. Therefore the method has a potential in characterisation of materials in the nanoworld.

AR coatings on laser crystals for HiPER project

In this contribution we present a technology for deposition of interference coatings for optical components designed to operate as active media in power pulsed lasers. The aim of the technology is to prepare crystals for lasers for the HiPER project (High Power laser Energy Research) which should demonstrate the feasibility of laser driven fusion as a future energy source. Diode pumped solid state lasers (DPSSL) are the most likely option for fusion ignition. The choice of material for the lasers active medium is critical. Some of the most important properties include the ability to be antireflection coated to reduce the energy losses and increase the overall efficiency. This contribution deals with some of the materials considered to be candidates for slabs serving as the active medium of the DPSSLs. We tested Yb:YAG, Yb:CaF 2 samples. As large amounts of heat need to be dissipated during laser operation, cryogenic cooling is necessary. Appropriate coating materials and techniques need to be chosen. Therefore differences between available coating techniques are investigated in terms of adhesion, enduring of stress resulting from temperature shocks, etc. Coated samples were placed into cryogenic environment in order to simulate conditions similar to those in real life operation. Optical microscopy was used for coating investigation after the conducted experiments.

Using spatial light modulator for correction of wavefront reflected from optically rough surface

We present an experimental study of the method using a spatial light modulator for correction of the wavefront reflected from the optically rough surface. This method is based on the detection of the mutual phase differences between different regions of the wavefront that correspond to the constructive interference. We study the capabilities of this method from the metrological point of view for the ground glass samples characterized by several different levels of roughness. The resulting wavefront correction is tested in dependence on the measurement parameters settings and is verified by analyzing two specific patterns generated by the spatial light modulator.

Advanced interferometry systems for dimensional measurement in nanometrology

We report on the results of the common collaborative project of applied research where the Institute of Scientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta - optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta – optika. The main aim of the project is a design of a complex interferometric measuring system in a form of a prototype serving as a master for further production. It concept is a modular family of components configurable for various arrangements primarily for multi-axis measurements in nanotechnology and surface inspection. Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta – optika contributes with development of new technology together with a design of a machine for processing and polishing of high-precision flat-surface optical components.

Industrial interferometry systems for multi-axis measurement

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta – optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta – optika. Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta – optika contributes with development of new technology for processing and polishing of high-precision flat-surface optical components.

Interferometry within a resonant cavity with standing wave detection

We present a measuring technique for displacement and position sensing over a limited range with detection of standingwave pattern inside of a passive Fabry-Perot cavity. The concept considers locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Sensing of the interference maxima and minima within the cavity along the beam axis has been tested and proven with a low loss photoresistive photodetector based on a thin polycrystalline silicon layer.

Displacement measurement with intracavity interferometry

We present a measuring technique for displacement and position sensing over a limited range with detection of standingwave pattern inside of a passive Fabry-Perot cavity. The concept considers locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows to stabilize wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneities. Sensing of the interference maxima and minima within the cavity along the beam axis has been tested and proven with a low loss photoresistive photodetector based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.

Interferometry with Stabilization of Wavelength within a Fixed Measuring Range

We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. One of the important limiting factors in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty traditionally compensated when the index is evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 10− 8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations.