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Johannes Voelkl

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Publication

Featured researches published by Johannes Voelkl.

Archive | 1997

Device for treating a substrate

Roland Rupp; Johannes Voelkl

Archive | 1997

Method and apparatus for the production of SiC by means of CVD with improved gas utilization

Roland Rupp; Johannes Voelkl

Archive | 2002

Seed crystal holder with lateral mount for an SiC seed crystal

Harald Kuhn; Rene Stein; Johannes Voelkl; Wolfgang Zintl

Archive | 2002

Method for the sublimation growth of an SiC single crystal, involving heating under growth pressure

Harald Kuhn; Rene Stein; Johannes Voelkl

Archive | 2002

Device having a foil-lined crucible for the sublimation growth of an SiC single crystal

Harald Kuhn; Rene Stein; Johannes Voelkl

Archive | 1999

METHOD FOR GROWING SiC MONOCRYSTALS

Rene Stein; Harald Kuhn; Johannes Voelkl

Archive | 1996

Substrate induction heating apparatus especially for CVD

Roland Rupp; Johannes Voelkl

Archive | 1997

Method and device for forming film on surface of at least one substrate by chemical vapor deposition

Roland Rupp; Johannes Voelkl; フエルクル ヨハネス; ルツプ ローラント

Archive | 1997

Silicon carbide product for microelectronic device

Dethard Peters; Reinhold Schoerner; Johannes Voelkl

Archive | 1999

Vorrichtung zur Herstellung eines SiC-Einkristalls mit einem doppelwandigen Tiegel

Rene Stein; Harald Kuhn; Johannes Voelkl

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Roland Rupp

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Rene Stein

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Harald Kuhn

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Dethard Peters

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Reinhold Schoerner

Infineon Technologies

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Wolfgang Zintl

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