Johannes Voelkl

Device for treating a substrate

Method and apparatus for the production of SiC by means of CVD with improved gas utilization

Seed crystal holder with lateral mount for an SiC seed crystal

Method for the sublimation growth of an SiC single crystal, involving heating under growth pressure

Device having a foil-lined crucible for the sublimation growth of an SiC single crystal

METHOD FOR GROWING SiC MONOCRYSTALS

Substrate induction heating apparatus especially for CVD

Method and device for forming film on surface of at least one substrate by chemical vapor deposition

Silicon carbide product for microelectronic device

Vorrichtung zur Herstellung eines SiC-Einkristalls mit einem doppelwandigen Tiegel