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John W. Vanderpot

Axcelis Technologies

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Publication

Featured researches published by John W. Vanderpot.

Archive | 1997

Microfeature wafer handling apparatus and methods

John W. Vanderpot; John D. Pollock

Archive | 2005

Reciprocating drive for scanning a workpiece through an ion beam

John W. Vanderpot; John D. Pollock; Donald W. Berrian

Archive | 2000

Compact load lock system for ion beam processing of foups

John W. Vanderpot; John D. Pollock

Archive | 2000

Load lock system for foups

John W. Vanderpot; John D. Pollock

Archive | 2006

Charged beam dump and particle attractor

John W. Vanderpot; Yongzhang Huang

Archive | 2005

Method for reciprocating a workpiece through an ion beam

John W. Vanderpot; John D. Pollock; Donald W. Berrian

Archive | 1997

Encapsulated thermofoil heater apparatus and associated methods

John D. Pollock; John W. Vanderpot

Archive | 2006

Particulate prevention in ion implantation

Donald W. Berrian; John W. Vanderpot

Archive | 2005

Reciprocating drive for scanning a workpiece

John W. Vanderpot; John D. Pollock; Donald W. Berrian

Archive | 1998

Gas bearing turbo pump and gas bearing feedthrough

John D. Pollock; John W. Vanderpot

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John D. Pollock

Axcelis Technologies

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Donald W. Berrian

Axcelis Technologies

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John Pollack

Axcelis Technologies

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Yongzhang Huang

Axcelis Technologies

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