Jonghwa Won

Magnetic MEMS sensor device

A microelectromechanical system (MEMS) sensor and method for measuring the motion of an intermediate member and a method for making the MEMS sensor. The MEMS sensor includes a substrate, a lower magnetic member disposed on the substrate, a layer disposed over the substrate, an upper magnetic member disposed at a side of the layer facing the lower magnetic member, an intermediate magnetic member magnetically levitated between the lower magnetic member and upper magnetic member; and a component measuring at least one of motion, forces acting on, and a displacement of the intermediate magnetic member.

A Copper/Polyimide Fabrication Process for Fabricating High-Inductance Microinductor

This paper reports on a technological process that combines copper as conductor, permalloy as magnetic core material, and polyimide as insulation material to complete a microinductor on glass with high inductance. The shape of the magnetic core scheme was rectangular, of which the width of the long side and short side were 1.4 and 0.6 mm, respectively. The dimensions of the inductor are 3.86 mm times 3.94 mm times 90 mum with coil width of 20 mum and space of 35 mum. The results show that the maximum inductance is 4 muH at 1 MHz, and the maximum quality factor (Q-factor) is 1.5 at 2 MHz.

From optical MEMS to photonic crystal

This paper presents the emergence of photonic crystals as significant optomechatronics components, following optical MEMS. It is predicted that, in the coming years, optical MEMS and photonic crystals may go through dynamic interactions leading to synergy as well as competition. First, we present the Structured Defect Photonic Crystal (SDPCTM) devised by the authors for providing the freedom of designing photonic bandgap structures, such that the application of photonic crystals be greatly extended. Then, we present the applications of optical MEMS and photonic crystals to displays and telecommunications. It is shown that many of the applications that optical MEMS can contribute to telecommunications and displays may be implemented by photonic crystals.