Jose P. Joseph

Multilayer ionic devices fabricated by the plasma-spray method

Abstract Using the plasma spray method, ceramic films can be easily and quickly coated onto a substrate. Zirconia-based oxygen sensors, both potentiometric-mode and amperometric-mode, were fabricated by the plasma-spray method and their oxygen sensing ability was demonstrated. Stabilized zirconia films had sufficient ionic conductivity for use in oxygen sensors. The film permeability was controlled by changing spray conditions, providing flexibility in the design of amperometric-mode sensors. Combined with other thin- and thick-film techniques, and shadow mask technologies, the plasma spray method has great potential in the fabrication of multilayered ceramic devices, especially in batch processes.

Multilayer ionic devices fabricated by thin- and thick-film technologies

Abstract A variety of ionic devices based on thin- and thick-film technologies as well as micromachining techniques have been developed at TSDC, and are discussed in this review paper. Five ionic devices are exampled: a LaF 3 -based fuel cell, LaF 3 smart humidity/temperature sensor, room-temperature micro-electrochemical smart sensor (RT-MECSS), back cell electrochemical gas sensor, and air electrolyte gas sensor. The benefits and problems in merging thin- and thick-film technologies in developing these devices are discussed.