Juehui Zhou

High sensitivity humidity sensors using flexible surface acoustic wave devices made on nanocrystalline ZnO/polyimide substrates

Flexible ZnO/polyimide surface acoustic wave (SAW) based humidity sensors were fabricated and their performances were investigated. ZnO films deposited on polyimide substrates are (0002) oriented columnar nanocrystals with grain sizes of 50–60 nm. SAW devices with different wavelengths showed high transmission performance, and the sensors exhibited a good repeatability in response to the cyclic change in humidity from ∼5% relative humidity (RH) to ∼87% RH. The responses of the sensors to RH change increase with the increase in humidity. The sensitivity increases with the decrease in wavelength owing to the improved characteristics of the sensors with shorter wavelengths. A high sensitivity of 34.7 kHz/10% RH has been obtained from a SAW sensor with no surface treatment, demonstrating that the flexible SAW humidity sensors are very promising for applications in flexible sensors and microsystems.

Film bulk acoustic resonator pressure sensor with self temperature reference

A novel film bulk acoustic resonator (FBAR) with two resonant frequencies which have opposite reactions to temperature changes has been designed. The two resonant modes respond differently to changes in temperature and pressure, with the frequency shift being linearly correlated with temperature and pressure changes. By utilizing the FBARs sealed back trench as a cavity, an on-chip single FBAR sensor suitable for measuring pressure and temperature simultaneously is proposed and demonstrated. The experimental results show that the pressure coefficient of frequency for the lower frequency peak of the FBAR sensors is approximately −17.4 ppm kPa−1, while that for the second peak is approximately −6.1 ppm kPa−1, both of them being much more sensitive than other existing pressure sensors. This dual mode on-chip pressure sensor is simple in structure and operation, can be fabricated at very low cost, and yet requires no specific package, therefore has great potential for applications.

High performance dual-wave mode flexible surface acoustic wave resonators for UV light sensing

Dual-mode flexible ZnO/polyimide surface acoustic wave (SAW)-based ultraviolet (UV) light sensors were fabricated and their performance was investigated. UV light sensing measurements showed that the responses of the dual wave modes of the sensors increase with the increase of light intensity and the frequency changes linearly with the change of light intensity. Under a 4.5 mW cm−2 UV light illumination, the resonant frequency of the Rayleigh wave decreased up to ~43 kHz, while that of the Lamb wave was approximately 76 kHz. The UV light sensitivities for the two resonant modes are 111.3 and 55.8 ppm (mW cm−2)–1, respectively. The resonant frequency, phase angle and amplitude of the two resonant modes exhibited a good repeatability in responding to cyclic change of the UV light, and an excellent stability up to a long duration of UV light exposure. The dual-mode flexible SAW resonators are simple in structure, more accurate in detection, and can be fabricated at low cost are, therefore, very promising for application in flexible sensors and electronics.

High frequency microfluidic performance of LiNbO3 and ZnO surface acoustic wave devices

Rayleigh surface acoustic wave (SAW) devices based on 128° YX LiNbO3 and ZnO/Si substrates with different resonant frequencies from ∼62 MHz to ∼275 MHz were fabricated and characterized. Effects of SAW frequency and power on microfluidic performance (including streaming, pumping, and jetting) were investigated. SAW excitation frequency influenced the SAW attenuation length and hence the acoustic energy absorbed by the liquid. At higher frequencies (e.g., above 100 MHz), the SAW dissipated into liquid decays more rapidly with much shorter decay lengths. Increasing the radio frequency (RF) frequencies of the devices resulted in an increased power threshold for streaming, pumping, and especially jetting, which is attributed to an increased absorption rate of acoustic wave energy. ZnO SAW devices could achieve similar streaming, pumping, and jetting effects as well as frequency effect, although the SAW signals are relatively weaker.

A Single FBAR-Based Temperature and Pressure Sensors

A novel temperature and pressure sensor based on a single film bulk acoustic resonator (FBAR) is designed. This FBAR support two resonant modes, which response opposite to the change of temperature. By sealed the back cavity of a back-trench membrane type FBAR with silicon wafer, an on-chip single FBAR sensor suitable for measuring temperature and pressure simultaneously is proposed. For unsealed device, the experimental results show that the first resonant mode has a temperature coefficient of frequency (TCF) of 69.5ppm/K, and the TCF of the second mode is -8.1ppm/K. After sealed the back trench, it can be used as a pressure sensor, the pressure coefficient of frequency (PCF) for the two resonant mode is -17.4ppm/kPa and -6.1 ppm/kPa respectively, both of them being more sensitive than other existing pressure sensors.

Evaluation of a Superconducting Augmented Rail-Type Electromagnetic Launch System

In this paper, a superconducting augmented rail-type electromagnetic launch system (SAREML) is proposed due to its inherent advantages in terms of lower current, smaller rail ablation, higher propulsive force, and higher energy efficiency. A superconducting coil to enhance the magnetic field was designed and analyzed. The inductance was calculated using the finite element method. Then, the mathematic model of a superconducting augmented linear propulsion system was established. The MATLAB/Simulink model was built accordingly. The dynamic simulations were carried out. The results demonstrated that a SAREML with superconducting augmentation is more effective.

Mechanical and Optical Properties of Ion-exchange Strengthened Glass Coated with Sol-Gel Derived ZrO 2 -SiO 2 Film: Mechanical and Optical Properties of Ion-exchange Strengthened Glass Coated with Sol-Gel Derived ZrO 2 -SiO 2 Film

采用溶胶-凝胶法在玻璃表面制备出ZrO 2 -SiO 2 薄膜, 然后通过离子交换形成镀膜增强玻璃, 研究了薄膜组成对离子交换增强玻璃的力学和光学性能的影响。利用紫外可见分光光度计、激光椭偏仪、纳米压痕、三点抗弯和能谱(EDX)分析了薄膜结构及性能。结果表明: 所有薄膜均连续均匀, 纯ZrO 2 薄膜为四方相结构, 含Si薄膜为无定形结构; 薄膜具有较高弹性恢复率(>60%)以及 H / E 比(>0.1), 有利于强度增强; 随Si含量增加, 可见光透过率增大, 但表面硬度和杨氏模量随之降低; 0.5ZrO 2 -0.5SiO 2 薄膜综合性能最佳: 表面硬度为18 GPa, 抗弯强度为393 MPa, 厚度~45 nm时可见光透过率大于85%。采用溶胶-凝胶法在玻璃表面制备出ZrO 2 -SiO 2 薄膜, 然后通过离子交换形成镀膜增强玻璃, 研究了薄膜组成对离子交换增强玻璃的力学和光学性能的影响。利用紫外可见分光光度计、激光椭偏仪、纳米压痕、三点抗弯和能谱(EDX)分析了薄膜结构及性能。结果表明: 所有薄膜均连续均匀, 纯ZrO 2 薄膜为四方相结构, 含Si薄膜为无定形结构; 薄膜具有较高弹性恢复率(>60%)以及 H / E 比(>0.1), 有利于强度增强; 随Si含量增加, 可见光透过率增大, 但表面硬度和杨氏模量随之降低; 0.5ZrO 2 -0.5SiO 2 薄膜综合性能最佳: 表面硬度为18 GPa, 抗弯强度为393 MPa, 厚度~45 nm时可见光透过率大于85%。

Synthesis by arc-discharge method and electrochemical lithium insertion properties of double-walled carbon nanotubes

Double-walled carbon nanotubes could be synthesized by arc-discharge method using ball-milling mixtures of iron, cobalt, nickel and sulfide as catalysts. Structures of these carbon nanotubes were characterized by TEM, HRTEM and Raman spectroscopy. Also the lithium insertion properties were examined. The results showed that the irreversible capacity of the double-walled carbon nanotube lithium ion batteries is high, which is considered to be related to the formation of SEI on the surface of the electrodes in the process of electrochemistry reaction.