Jun Nakauchi
Mitsubishi
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Featured researches published by Jun Nakauchi.
Molecular Crystals and Liquid Crystals | 1991
Keiichi Sakashita; Mizuo Shindo; Jun Nakauchi; Mioko Uematsu; Yoshitaka Kageyama; Seiji Hayashi; Tetsuya Ikemoto; Kenji Mori
Abstract A series of new chiral compounds with a δ-valerolactone ring were synthesized and the physical properties of these compounds as well as the electrical properties of their ferroelectric liquid crystal (FLC) mixtures were investigated. The magnitude of spontaneous polarization (Ps) in the chiral smectic C phase (SmC*) was found to be as high as 384 nC/cm2 for (2R, 5R)-2-(4′-octyloxybiphenyl-4-carboxy)-5-butyl-δ-valerolactone at ΔT = Tc - T = 5°C, where Tc is the temperature of transition from the isotropic phase to the SmC* phase and T is the temperature at which the experiments were carried out. An FLC mixture containing 2% by weight of the optical isomer, (2S, 5R)-2-(4′-octyloxy-biphenyl-4-carboxy)-5-hexyl-δx-valerolactone exhibited a response time as fast as 96 μ seconds at 25°C, for an applied square-wave voltage of ± 10 volts. The relationship between the structural properties and the thermal properties, magnitude and polarity of Ps as well as the response times for their FLC mixtures are disc...
26th Annual International Symposium on Microlithography | 2001
Hikaru Momose; Shigeo Wakabayashi; Tadayuki Fujiwara; Kiyoshi Ichimura; Jun Nakauchi
The relationship between the sensitivity of ArF photoresist and the end group structures of copolymers consisting of (beta) -hydroxy-(gamma) -butyrolactone methacrylate (HGBMA) and 2-methyl-2-adamantyl methacrylate (MadMA) was investigated. The sensitivity is strongly dependent on the kind and amount of end groups. It has been found that the copolymer with relatively non-polar end group structure has higher sensitivity than that with polar end group structure, and that the sensitivity of copolymer with end groups of methylisobutyrate and 1-octhylthio moieties showed approximately three times higher than that of copolymer with end groups of isobutyronitrile and 2-hydroxyethylthio moieties. The difference of sensitivity among these copolymers has been discussed from the view point of the change of development rate attributed to the amount of carboxylic acid groups formed in the resist film by exposure of 193nm light.
Liquid Crystals | 1990
Jun Nakauchi; Mioko Uematsu; Keiichi Sakashita; Yoshitake Kageyama; Seiji Hayashi; Kenji Mori
Abstract Novel optically active compounds derived from (R)-3-hydroxynonanoic acid as shown in a general formula (I) have been synthesized and their mesomorphic and ferroelectric properties have been investigated. The kind of mesophases and the transition temperatures depend strongly on the linkage groups and the substituents in the core. The compounds with an unsubstituted core show non-titled smectic mesophases (smectic A or B). The chiral smectic C phase appears in the compounds having a central ester linkage and a chloro-substituent as the A 1 or B 1 position and in the compound having a central -OCH2- linkage and a chloro-substituent at the A 1 position. The maximum spontaneous polarization (500 μC/m2) was observed in 4-dodecyloxy-3-chlorobenzoyl-oxyphenyl (R)-3-hydroxynonanoate. The thermal stability of each mesophase and the ferroelectric properties have been discussed from the structural point of view.
Archive | 1996
Jun Nakauchi; Osamu Kawai
Archive | 2005
Fumino Momose; Masayuki Toyama; Haruko Takahashi; Shinichi Maeda; Takashi Saitoh; Jun Nakauchi
Archive | 1991
Seiji Hayashi; Jun Nakauchi; Keiichi Sakashita; Yoshitaka Kageyama; Yoshihiko Sako
Archive | 1990
Jun Nakauchi; Mioko Uematsu; Keiichi Sakashita; Yoshitaka Kageyama; Kenji Mori
Archive | 2005
Shinichi Maeda; Fumino Momose; Jun Nakauchi; Takashi Saito; Haruko Takahashi; Masayuki Toyama; 純 中内; 晋一 前田; 扶実乃 百瀬; 昌之 遠山; 晴子 高橋; 隆司 齋藤
Archive | 1986
Hiroyuki Uchida; Jun Nakauchi
Archive | 1988
Jun Nakauchi; Mioko Uematsu; Keiichi Sakashita; Yoshitaka Kageyama; Seiji Hayashi; Kenji Mori