Jun Sakuma

Efficient optical parametric oscillation based on periodically poled 1.0 mol % MgO-doped stoichiometric LiTaO3

Effective optical parametric oscillation (OPO) at room temperature was demonstrated by a periodically poled 1.0 mol% MgO-doped stoichiometric lithium tantalate (Mg:SLT) crystal. The slope conversion efficiency of total output power was ∼65% and the maximum output power was 655 mW at 1.3 W pumping without photorefraction. The difference of the OPO performance was investigated between 0.5 and 1.0 mol % Mg:SLT crystals, and a 1.0 mol % MgO-doped device exhibited better OPO performance and high resistance of photorefraction. The effective nonlinear coefficient of deff was found to be 10pm∕V by single-pass first-order quasiphase matched second-harmonic generation at 1064 nm.

Generation of 5-W deep-UV continuous-wave radiation at 266 nm by an external cavity with a CsLiB6O10 crystal.

A Brewster-cut CsLiB6O10 crystal is employed as an external resonant frequency doubler to generate cw deep-UV radiation at 266 nm. We have generated 5.0 W of usable cw output power, which is 6.1 W in the crystal, for an incident green power of 9.6 W, corresponding to an internal conversion efficiency of 61.8%. The power obtained is, to our knowledge, three times higher than previously reported for cw 266-nm generation.

All-solid-state, high-power, deep-UV laser system based on cascaded sum-frequency mixing in CsLiB 6 O 10 crystals

We report on an efficient use of CsLiB6O10 (CLBO) crystals employed for an all-solid-state deep-UV laser system operated at 5 kHz. We obtained greater than 3 W of UV radiation around 242 nm by mixing the 349-nm third harmonic of a Nd:YLF laser with the tunable output from a Ti:sapphire laser in a CLBO crystal. This UV radiation was subsequently mixed with the residual 1047-nm output from the Nd:YLF laser in a second CLBO crystal. The system produced 1.5 W of deep-UV radiation at 196.3 nm, which is, to our knowledge, the highest deep-UV power below 200 nm generated in a nonlinear optical crystal. Additionally, the bandwidth of both outputs was estimated to be less than 200 MHz.

High-power CW deep-UV coherent light sources around 200 nm based on external resonant sum-frequency mixing

We report pure continuous-wave (CW) high-power (>100 mW) deep-ultraviolet (DUV) light sources emitting around 200-nm spectral region based on singly resonant sum-frequency mixing (SRSFM). Efficient DUV generation is made possible by use of a Brewster-cut CsLiB/sub 6/O/sub 10/ (CLBO) crystal near noncritically phase-matched (NCPM) condition for the SFM of 1-/spl mu/m output of neodymium lasers. The CW radiation of fifth-harmonic wavelength of a neodymium laser at 213 nm was generated by the SFM of enhanced 1064-nm radiation with single-passing 266-nm radiation produced by external-resonant frequency doubling of a 532-nm green laser. With 1.8 W of 266-nm radiation incident upon a CLBO crystal, as much as 180 mW of CW 213-nm power has been produced. The sub-200-nm CW radiation with 140-mW power has also been achieved by SFM of 1064 nm with 244-nm radiation from a frequency-doubled Argon-ion laser in the CLBO crystal operated near the NCPM condition.

High-power narrowband DUV laser source by frequency mixing in CLBO

We describe an all solid-state, high power, deep-UV (DUV) source based on sum-frequency mixing (SFM) of two single- frequency laser outputs. The system consists of a CW diode- pumped, Q-switched Nd:YLF laser operating at 1047 nm, a Ti:sapphire laser at 785-nm, and cascading SFM stages. Both laser sources are configured with an injection-seeded oscillator followed by amplifier to produce high power, single-frequency, TEM00 outputs. The third harmonic of Nd:YLF MOPA is mixed with the output from Ti-sapphire MOPA to generate the first UV, which is used for the second mixing with the residual fundamental output to generate the DUV radiation. CLBO crystal is employed for each SFM process. The system produced UV pulses at 241.6 nm with 3.4 W, and also DUV at 196.3 nm with 1.5 W of average powers at a 5-kHz pulse- repetition rate. The linewidth of the DUV output was measured to be less than 0.05 pm.

Stable long-life 1-W femtosecond laser for industrial and biomedical applications

We have successfully developed a highly-stable commercial femtosecond laser. We achieved continuous operation of femtosecond laser over 4,000 hours.

Properties and applications of CLBO

Summary form only given. In this talk various information on the properties of CsLiB/sub 6/O/sub 10/ (CLBO) and the latest life test data at high repetition rate are provided for applications in reliable UV lasers.

CW DUV light sources for inspection tools

We describe true continuous-wave (CW), high-power, line-narrowed, deep-ultraviolet (DUV) light sources for the high-resolution metrology tools such as wafer inspection and mask inspection systems. The 198.5-nm CW radiation with 300-mW power has also been achieved by sum-frequency mixing (SFM) of 1064-nm output from a single-frequency Yb3+ fiber amplifier with the 244-nm radiation from a frequency-doubled argon-ion laser. The 266-nm CW DUV radiation with 5 W of maximum power has been generated by frequency doubling of 532-nm green laser output. Both sources utilize Brewster-cut CsLiB6O10 (CLBO) crystal for efficient and stable DUV light generation.

High-power CW DUV coherent light source around 200 nm

An efficient optical frequency mixer employing a Brewster-cut CLBO crystal has been developed for the generation of high-power CW DUV coherent radiation. DUV light of 180mW at 213nm and 140mW at 198.5nm have been produced.

Continuous-wave 193.4 nm laser with 120 mW output power

This Letter describes an all-solid-state continuous-wave, deep-ultraviolet coherent source that generates more than 100 mW of output power at 193.4 nm. The source is based on nonlinear frequency conversion of three single-frequency infrared fiber laser master-oscillator power-amplifier (MOPA) light sources.