Jung-Soo Woo

50 nm SOI CMOS transistors with ultra shallow junction using laser annealing and pre-amorphization implantation

CMOS transistors with 50 nm physical gate length are fabricated by laser annealing (LA) combined with pre-amorphization implantation (PAI) on an SOI substrate. Very low energy laser annealing is made possible by the SOI substrate, resulting in a large process window margin without undesirable parasitic phenomena. The transistors fabricated by the proposed method show higher drive current and better short channel effects than conventionally rapid thermal annealed (RTA) devices.

Novel direct-tunneling-current (DTC) method for channel length extraction beyond sub-50nm gate CMOS

A novel method for accurate gate length extraction has been developed using direct tunneling current (DTC) through thin gate oxide. Applied to decanano CMOS devices, the proposed method is verified to be free from a severe assumption of unified effective mobility that is one of limitations of conventional method to sub-0.1 /spl mu/m. The DTC method is also insensitive to doping concentration and gate oxide thinning effect at the corner regions. In addition, we have studied the channel length dependence on gate line-edge roughness by comparing the DTC method and the conventional channel current method.

Coexistence analysis between IMT system and DTV system in the 700MHz band

In this paper, we analyze the coexistence between the International Mobile Telecommunications (IMT) system and the digital television (DTV) system in the 700MHz band. The 700MHz band is now called the “digital dividend” and is expected to be allocated to IMT services. This plan could cause mutual interference between existing broadcasting and the IMT services. The members in the Asia-Pacific Telecommunity Wireless Group are currently discussing the coexistence issues associated with the 700MHz band. In order to allocate this band to the IMT services without harming the DTV system, coexistence problems should be solved. This paper presents the simulation methodology for analyzing the mutual interference between the IMT and DTV system and provides the results of the performance degradation of the two systems.