Jung-Sung Hwang

Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module

Air conditioning system for semiconductor clean room including a chemical filter downstream of a humidifier

Wafer transfer system and method of controlling pressure in the system

Contamination control system and air-conditioning system of a substrate processing apparatus using the same

Drive checking system for fan filter units in clean room

Sensitive substance and surface acoustic wave gas sensor using the same

Driving control system and monitoring device for fan filter unit in semiconductor clean room

Apparatus to suppress ascending gas flow and method for exhaust control thereof

Filter medium, filter and apparatus for supplying air or chemical equipped with the same

Gas purifying system