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Jung-Sung Hwang

Samsung

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Publication

Featured researches published by Jung-Sung Hwang.

Archive | 2003

Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module

Yo-han Ahn; Ki-Doo Suwon Kim; Soo-Woong Lee; Jung-Sung Hwang; Hyeog-Ki Kim

Archive | 1997

Air conditioning system for semiconductor clean room including a chemical filter downstream of a humidifier

Nam-Hee You; Jung-Sung Hwang; Gee-do Kim; Young-jin Han

Archive | 2004

Wafer transfer system and method of controlling pressure in the system

Soo-Woong Lee; Hyung-Seok Choi; Jung-Sung Hwang; Sung-hwan Choi

Archive | 2004

Contamination control system and air-conditioning system of a substrate processing apparatus using the same

Tae-jin Hwang; Jae-Hyun Yang; Jung-Sung Hwang; Hyun-joon Kim; Yo-han Ahn

Archive | 1998

Drive checking system for fan filter units in clean room

Kun-hyung Lee; Jung-Sung Hwang; Yo-han Ahn; Jae-heung Choi

Archive | 2003

Sensitive substance and surface acoustic wave gas sensor using the same

Kun-hyung Lee; Jung-Sung Hwang; Seung-Yeon Cho

Archive | 1997

Driving control system and monitoring device for fan filter unit in semiconductor clean room

Jung-Sung Hwang; Jae-heung Choi; Yo-han Ahn; Dongjoo Lee

Archive | 2006

Apparatus to suppress ascending gas flow and method for exhaust control thereof

Hyung-Seok Choi; Jung-Sung Hwang; Kyoung-ho Park; Kil-sun Ko; Yong-woon Oh

Archive | 2002

Filter medium, filter and apparatus for supplying air or chemical equipped with the same

Tae-ho Kim; Jung-Sung Hwang; Hyun-Cheon Jang; Soon-young Lee

Archive | 2001

Gas purifying system

Jung-Sung Hwang; Tae-ho Kim; Soon-young Lee; Jae-heung Choi

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Collaboration

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Nam-Hee You

Samsung

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Yo-han Ahn

Samsung

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Dong-Soo Lee

Samsung

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Dongjoo Lee

Seoul National University

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Hyung-Seok Choi

Samsung

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Jae-heung Choi

Samsung

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Soo-Woong Lee

Samsung

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Sun-Young Lee

Pusan National University

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Tae-jin Hwang

Samsung

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Byung-Moo Lee

Samsung

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