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Dive into the research topics where Kamikubo Takashi is active.

Publication


Featured researches published by Kamikubo Takashi.


Archive | 2003

CHARGED BEAM DELINEATING METHOD AND DELINEATING DEVICE

Abe Takayuki; Oki Susumu; Kamikubo Takashi; Yasuse Hiroto


Archive | 2008

ELECTRON BEAM DRAWING SYSTEM AND CONTROL METHOD THEREOF

Shimizu Mitsuko; Abe Takayuki; Yasuse Hiroto; Oki Susumu; Kamikubo Takashi; Murakami Eiji; Hattori Yoshiaki; Iijima Tomohiro; Higure Hitoshi; Matsuki Kazuto


Archive | 2009

CALIBRATION SUBSTRATE FOR CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND LITHOGRAPHY METHOD

Tsuruta Kaoru; Kamikubo Takashi; Nishimura Rieko; Yoshitake Hidesuke; Tamamushi Shuichi


Archive | 2001

CHARGE BEAM PLOTTING SYSTEM AND PLOTTING METHOD

Yasuse Hiroto; Abe Takayuki; Iijima Tomohiro; Hattori Yoshiaki; Oki Susumu; Shimizu Mitsuko; Nakayamada Kensho; Kamikubo Takashi


Archive | 2000

ELECTRON BEAM LITHOGRAPHY SYSTEM AND METHOD FOR CONTROLLING THE SAME

Shimizu Mitsuko; Abe Takayuki; Yasuse Hiroto; Oki Susumu; Kamikubo Takashi; Murakami Eiji; Hattori Yoshiaki; Iijima Tomohiro; Higure Hitoshi; Matsuki Kazuto


Archive | 2009

CHARGED PARTICLE BEAM DRAWING DEVICE, AND CHARGED PARTICLE BEAM DRAWING METHOD

Iijima Tomohiro; Kamikubo Takashi


Archive | 2011

CHARGED-PARTICLE BEAM WRITING APPARATUS AND PROXIMITY EFFECT CORRECTING METHOD THEREOF

Hara Shigehiro; Tamamushi Shuichi; Kamikubo Takashi; Higurashi Hitoshi; Sakamoto Shinji; Sakai Yusuke; Okamoto Yoshihiro; Anpo Akihito


Proc SPIE | 2010

マスクプロセス補正(MPC)モデリングとその電子ビームマスク描画装置EBM‐7000用のEUVマスクへの応用

Kamikubo Takashi; Ohnishi Takayuki; Hara Shigehiro; Anze Hirohito; Hattori Yoshiaki; Tamamushi Shuichi; Bai Shufeng; Wang Jen‐Shiang; Howell Rafael; Chen George; Li Jiangwei; Tao Jun; Wiley Jim; Kurosawa Terunobu; Saito Yasuko; Takigawa Tadahiro


Archive | 2010

EVALUATION SUBSTRATE OF CHARGED PARTICLE BEAM

Kamikubo Takashi; Tamamushi Shuichi


Archive | 2009

CORRECTING SUBSTRATE OF CHARGED PARTICLE BEAM WRITING APPARATUS AND WRITING METHOD

Tsuruta Kaoru; Kamikubo Takashi; Nishimura Rieko; Yoshitake Shusuke; Tamamushi Shuichi

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