Kanji Kuba
MITSUBISHI MATERIALS CORPORATION
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Publication
Featured researches published by Kanji Kuba.
Applied Surface Science | 1996
Kanji Kuba; Tadashi Sugihara
Controlling the kinetic energy of deposition species is an effective way to improve thin films physical properties. An apparatus that can select the kinetic energy of laser ablated particles was developed. It was demonstrated that the energy of laser ablated particle was selected by chopping with the slit of rotating disk. This apparatus was applied to thin film deposition and it was useful to improve surface morphology because the number of droplets on the film drastically decreased.
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms | 1997
Tadashi Sugihara; Kanji Kuba
Abstract Controlling the kinetic energy of deposition species is an effective way to improve a thin films physical properties. An apparatus that can select the kinetic energy of laser-ablated particles was developed. It was demonstrated that the energy of the laser-ablated particles was selected by chopping with the slit of a rotating disk. The energy profile of each ablated particle is illustrated, and the relationships between the selected velocity region and the selection conditions, such as disk rotation speed and delay time, are demonstrated. This apparatus was applied to the deposition of Au, Pt and Ag thin films. This process was also useful to improve surface morphology because the number of droplets on these films drastically decreased.
Archive | 2012
Takuma Katase; Akihiro Masuda; Kanji Kuba
Archive | 2012
Sho Nakagawa; Hiroki Muraoka; Kanji Kuba; Yousuke Kawamura
Archive | 2007
Kanji Kuba; Akihiro Higami; Takahiro Uno
The Review of Laser Engineering | 1995
Tadashi Sugihara; Kanji Kuba
Archive | 2014
Ryuji Uesugi; Kanji Kuba
Archive | 2012
Takuma Katase; Akihiro Masuda; Kanji Kuba
Archive | 2014
Koutarou Iwata; Hiroki Muraoka; Kanji Kuba
Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT) | 2013
Hironori Uno; Masayuki Ishikawa; Akihiro Masuda; Hiroki Muraoka; Kanji Kuba