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Karl Boggs

Mackenzie Investments

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Publication

Featured researches published by Karl Boggs.

Archive | 2003

Passivative chemical mechanical polishing composition for copper film planarization

Jun Liu; Peter Wrschka; David Bernhard; Mackenzie King; Michael Darsillo; Karl Boggs

Archive | 2003

Chemical mechanical polishing compositions for copper and associated materials and method of using same

Michael Darsillo; Peter Wrschka; Karl Boggs

Archive | 2006

Integrated chemical mechanical polishing composition and process for single platen processing

Karl Boggs; Michael Darsillo; Peter Wrschka; James Welch; Jeffrey Giles; Michele Stawasz

Archive | 2004

Chemical mechanical polishing compositions for step-ll copper line and other associated materials and method of using same

Peter Wrschka; David Bernhard; Karl Boggs; Michael Darsillo

Archive | 2008

High throughput chemical mechanical polishing composition for metal film planarization

Karl Boggs; Michael Darsillo; Peter Wrschka; James Welch

Archive | 2008

Stabilization of polymer-silica dispersions for chemical mechanical polishing slurry applications

Karl Boggs; Jeffrey Giles; Michael Darsillo; Melissa A. Petruska; Peter Wrschka

Archive | 2008

Method of passivating chemical mechanical polishing compositions for copper film planarization processes

Jun Liu; Mackenzie King; Michael Darsillo; Karl Boggs; Jeffrey F. Roeder; Peter Wrschka; Thomas H. Baum

Archive | 2006

Composition de polissage chimico-mecanique a haut rendement pour planarisation de couche metallique

Karl Boggs; Michael Darsillo; Peter Wrschka; James Welch

Archive | 2006

Chemisch-mechanische polierzusammensetzung mit hohem durchsatz zur metallfilm-planarisierung

Karl Boggs; Michael Darsillo; Peter Wrschka; James Welch

Archive | 2004

Compositions ameliorees de polissage chimico-mecanique de cuivre et de matieres associees et procede d'utilisation desdites compositions

Michael Darsillo; Peter Wrschka; Karl Boggs

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Jeffrey F. Roeder

Bethel University

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Thomas H. Baum

IBM

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Gregory T. Stauf

United States Naval Research Laboratory

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