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Karlheinz Mueller

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Publication

Featured researches published by Karlheinz Mueller.

Archive | 2003

Automation and platform management system for naval vessels

Karlheinz Mueller; Matthias Schulze

Archive | 1987

Apparatus for the exact mutual alignment of a mask and semiconductor wafer in a lithographic apparatus

Karlheinz Mueller

Archive | 1987

Method and apparatus for changing the imaging scale in X-ray lithograph

Karlheinz Mueller

Archive | 1987

Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment

Karlheinz Mueller; Hans Dr.-Ing. Betz; Wilhelm Vach; Johann Krenner

Archive | 2003

Damage control system for ships

Karlheinz Mueller; Matthias Schulze

Archive | 1984

Process and device to determine a coordinate on the surface of a solid object

Karlheinz Mueller

Archive | 1996

Microelectronic integrated sensor and method for producing the sensor

Karlheinz Mueller; Stefan Kolb

Archive | 1998

Method for producing a multiplicity of microelectronic circuits on SOI

Karlheinz Mueller

Archive | 2000

Microelectronic integrated sensor

Karlheinz Mueller; Stefan Kolb

Archive | 1998

Method for producing a microelectronic integrated cantilever

Karlheinz Mueller; Stefan Kolb

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Stefan Kolb

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Holger Dipl Ing Poehle

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Matthias Schulze

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Hans Dr.-Ing. Betz

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Johann Krenner

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Wilhelm Vach

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