Katsumi Sato

Charge leakage characteristic of glass substrate for liquid crystal display

Abstract The effect of moisture and surface contamination on the charge leakage characteristics of glass substrate for LCD was discussed. The surface resistivity decreased with a relative humidity increase; the charge attenuation rate increased with the relative humidity increase. Two kinds of glass substrate were positively corona-charged under the same condition: one kind immediately after UV/O3 cleaning (cleaned sample) and the other left for about one month after UV/O3 cleaning (uncleaned sample). The surface resistivity of the uncleaned sample was 102, up to 105 times greater than that of the cleaned sample. The organic surface contaminant on the uncleaned sample was approximately three times greater than that on the cleaned sample. It was concluded that the attenuation rate of surface charge on glass substrate substantially depended on the relative humidity and also depended on the surface contamination caused by atmospheric hydrocarbon.