Kazuhiko Fujikawa
Panasonic
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Publication
Featured researches published by Kazuhiko Fujikawa.
international conference on micro electro mechanical systems | 1997
Kazuhiko Fujikawa; Goichi Hirakawa; Teruhiro Shiono; Koji Nomura
We established fabrication technologies for a binary optic microlens. A Si etch rate of 1.5 /spl mu/m/min and Si/photoresist selectivity of 40 were achieved when the RIE parameters were a ratio of O/sub 2/ in the SF/sub 6/-O/sub 2/ etching gas of 0.2 at a pressure of 100 mTorr and an rf power density of 0.2 W/cm/sup 2/. We also obtained good optical properties for a micro pyroelectric infrared sensor constructed with a Si binary optic microlens. The four-phase response is 1.9 times and the eight-phase response is 2.4 times larger than the two-phase response. These results nearly agree with those of the simulation for the phase microlens diffraction efficiency ratio.
Archive | 1994
Kazuhiko Fujikawa; Koji Nomura; Teruhiro Shiono; Hisahito Ogawa
Archive | 1999
Kazuhiko Fujikawa; Takeshi Masutani; Tsutomu Nakanishi; Shinji Umeda; Kazuki Komaki; Katsumasa Miki; Koji Nomura
Archive | 2000
Kazuhiko Fujikawa; Takeshi Masutani; Koji Nomura; Junji Kajiwara; Yasuhiko Yokota
Archive | 1999
Kazuhiko Fujikawa; Takeshi Masutani; Tsutomu Nakanishi; Shinji Umeda; Kazuki Komaki; Katsumasa Miki; Koji Nomura
Ieej Transactions on Sensors and Micromachines | 2001
Tsutomu Nakanishi; Kazuhiko Fujikawa; Kazuki Komaki; Takeshi Masutani; Koji Nomura
Archive | 2005
Kazuhiko Fujikawa; Susumu Inatsugu; Takeshi Masutani; Masami Segawa
Archive | 2000
Kazuhiko Fujikawa; Takeshi Masutani; Koji Nomura; Junji Kajiwara; Yasuhiko Yokota
Archive | 2000
Kazuhiko Fujikawa; Junji Kajiwara; Takeshi Masutani; Koji Nomura; Yasuhiko Yokota
Archive | 2000
Kazuhiko Fujikawa; Junji Kajiwara; Takeshi Masutani; Koji Nomura; Yasuhiko Yokota
